High Aspect Ratio Nanometrology using Carbon Nanotube Probes in Atomic Force Microscopy

Carbon Nanotube AFM Probe Technology

“…However, it is hard to accurately control the CNT probe's orientation during the CNT attachment process for most methods. External electric field method was effective for CNT probe's orientation control (Fang et al, 2007). In the welding method, nanotube was attracted to the opposite Si probe and favorably aligned with the apex of probe under external applying voltage, as shown in Fig.…”

“…CNT probes have also been showed higher image resolution for the high aspect ratio samples, such as, grating, cellular samples, etc (Dai et al, 1996;Fang et al, 2007;Hafner, 1999Hafner, , 2001Stevens et al, 2000). It is found that not only the CNT probe's radius would influence its resolution, its end configuration also showed impact on CNT probe's image ability ).…”

“…Then the method of using electron bombardment under the electric field was applied in the direct manipulation methods under optical microscope or SEM, which can observe and control the shortening process in real-time (Fang et al, 2007). A new 'nanoknife' method was proposed to precisely cut and sharpen CNT probe by local vaporization of carbon resulting from Joule heating (Wei et al, 2007).…”

“…In the plasma enhanced chemical vapor deposition (PECVD) method, the CNT probe's orientation was controlled by an electric field present in the plasma discharge to align the nanotubes parallel to the electric field (Ye et al, 2004). (Fang et al, 2007).…”

Carbon Nanotube-Based Nanomechanical Sensor: Theoretical Analysis of Mechanical and Vibrational Properties

“…CNT probes can be provided by manual attachment of a CNT to the tip of the AFM cantilever or by growing a CNT from the ends of the silicon tip of the AFM probe based on chemical vapor deposition (CVD) process. The welding method was developed for fixing CNT to the silicon probe end [52,53]. CVD methods reported by Prof. Hafner et al [54,55] allowed aligned growth of CNTs on the silicon probe surface, and the diameter and length of CNT could be controlled by adjusting the growth time and its growth temperatures ( Figure 12) [56].…”