High-Bandwidth AFM Probes for Imaging in Air and Fluid

Vijayraghavan, K.; Gellineau, Antonio; Wang, A.; Butte, Manish J.; Melosh, Nick; Solgaard, Olav

doi:10.1109/jmems.2012.2235822

Cited by 6 publications

(3 citation statements)

References 24 publications

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“…Figure 32 compares a regular AFM tip whose position is measured by an optical lever and an AFM tip with an integrated high-bandwidth grating force sensor [105], [106]. Both cantilevers utilize an optical lever to measure the harmonic upand-down motion of the cantilever itself, which is driven on resonance so its motion is close to harmonic.…”

Section: A Atomic Force Microscopy (Afm)mentioning

confidence: 99%

Optical MEMS: From Micromirrors to Complex Systems

Solgaard

Godil²,

Howe

et al. 2014

J. Microelectromech. Syst.

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132

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Microelectromechanical system (MEMS) technology, and surface micromachining in particular, have led to the development of miniaturized optical devices with a substantial impact in a large number of application areas. The reason is the unique MEMS characteristics that are advantageous in fabrication, systems integration, and operation of micro-optical systems. The precision mechanics of MEMS, microfabrication techniques, and optical functionality all make possible a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. In these systems, electrostatic, magnetic, thermal, and pneumatic actuators provide mechanical precision and control. The large number of electromagnetic modes that can be accommodated by beam-steering micromirrors and diffractive optical MEMS, combined with the precision of these types of elements, is utilized in fiber-optical switches and filters, including dispersion compensators. The potential to integrate optics with electronics and mechanics is a great advantage in biomedical instrumentation, where the integration of miniaturized optical detection systems with microfluidics enables smaller, faster, morefunctional, and cheaper systems. The precise dimensions and alignment of MEMS devices, combined with the mechanical stability that comes with miniaturization, make optical MEMS sensors well suited to a variety of challenging measurements. Micro-optical systems also benefit from the addition of nanostructures to the MEMS toolbox. Photonic crystals and microcavities, which represent the ultimate in miniaturized optical components, enable further scaling of optical MEMS.

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Section: A Atomic Force Microscopy (Afm)mentioning

confidence: 99%

Optical MEMS: From Micromirrors to Complex Systems

Solgaard

Godil²,

Howe

et al. 2014

J. Microelectromech. Syst.

Self Cite

132

View full text Add to dashboard Cite

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“…In the most common operation mode, tapping mode, the probe is oscillated near its resonant frequency and follows the surface topography by feedback control of this resonant amplified amplitude. When the probe makes contact with the sample, the force information can be extracted by analyzing the higher frequency components of the signal if care is taken to extract them [2]. With this versatility, AFM can study both the spatial (topographic) and the intricate tip surface force interactions.…”

Section: Introduction Motivationmentioning

confidence: 99%

Optical fiber atomic force microscope with photonic crystal force sensor

Gellineau

Wong

Wang

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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An atomic force microscope (AFM) integrated directly on the facet of a standard single-mode optical fiber is designed, fabricated, and tested. High resolution force sensing is achieved with a Fabry-Perot interferometer made of two photonic crystal (PC) mirrors separated by silicon springs. The device is fabricated with standard MEMS techniques and assembled on the facet of a single mode optical fiber by focus ion beam (FIB) welding and OmniProbe manipulation. We demonstrate that topographic and tip-sample interaction force information can be extracted from its reflected light. The force curve measurement has a resolution of 10pN/Hz 0.5 in a drastically smaller footprint than traditional AFMs, which can enable in-vivo AFM imaging.

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“…left and right halves of the quadrant photodiode, called the "lateral" signal, can be used to measure the relative displacement between the tip-coupled and reference fingers, and converted into a tip-sample interaction force. 14 To demonstrate the capabilities of the probe in fluid, we imaged a styrene-(ethylene/butylene)-styrene (SEBS) copolymer sample submerged in deionized water (Kraton G1652 30/40/30 styrene/ethylene-butylene/styrene purchased from Asylum Research). The sample is composed of a hard polystyrene segment and a softer rubbery segment of poly-(ethylene/butylene).…”

mentioning

confidence: 99%

Measurement of elastic properties in fluid using high bandwidth atomic force microscope probes

Vijayraghavan

Wang

Solgaard

et al. 2013

Applied Physics Letters

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High bandwidth interdigitated probes have enabled high-speed mapping of elastic properties of various samples in air. To extend this capability to imaging in fluids, we implemented a signal processing scheme to calculate the tip-sample interaction force as well as elastic properties from high-frequency photodiode signals. Using this method, we imaged a styrene-(ethylene/butylene)-styrene copolymer sample submerged in water and obtained spatial maps of elastic properties as well as maps of higher harmonics of the motion of the tip. We observed that multiple physical quantities contribute to the contrast observed in the phase and higher harmonic images.

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High-Bandwidth AFM Probes for Imaging in Air and Fluid

Cited by 6 publications

References 24 publications

Optical MEMS: From Micromirrors to Complex Systems

Optical MEMS: From Micromirrors to Complex Systems

Optical fiber atomic force microscope with photonic crystal force sensor

Measurement of elastic properties in fluid using high bandwidth atomic force microscope probes

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