High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid

Abstract

The bandwidth and contrast of secondary electron (SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement in SE image quality occurs as a consequence of the grounded Frisch grid electrostatically screening the ‘slow’ induced ion current signal, generated below the grid, from the induced current detected above the grid by the anode. Ion induced artefacts, such as image smearing at fast scan rates, are virtually eliminated using a Frisch grid. Gas amplification data are presented to illustrate that gas gain can be optimized by varying the Frisch grid–stage (amplification region) separation Frisch grid–anode (drift region) separation and stage bias.