We demonstrate that F+ centres (oxygen vacancy with a trapped electron) are induced by femtosecond laser scribing of a crystalline Al2O3 wafer and that they can be fully annealed at 1100 °C. The corresponding photoluminescence band at 325 nm which is induced by the femto second laser structuring of a sapphire surface is extinct after heat treatment. Thermal activation of oxygen diffusion in sapphire can explain the observation. The potential of pre-textured sapphire in lighting and micro-optical applications is discussed.