High confinement micron-scale silicon nitride high Q ring resonator

Gondarenko, Alexander; Levy, Jacob S.; Lipson, Michal

doi:10.1364/oe.17.011366

Cited by 285 publications

(206 citation statements)

References 13 publications

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“…As such, we combine the arguably best material for high-QM nanomechanics [20] (stoichiometric Si3N4) with an advantageous material for linear optics [21-24] (SiO2) in an integrated on-chip device, which allows the detection of ultra-small forces at the aN level. The advantages of silica for optical resonators result from higher thresholds for thermal nonlinearities when compared to silicon [25] or silicon nitride [26] as well as the absence of two photon absorption [27], thus allowing significantly higher circulating power and preventing cross talk between optical modes induced by the nonlinearity. Moreover, silica microresonators can be coupled with high efficiency to optical fiber as required for highly efficient measurements of position or force.…”

Section: Nanomechanical Oscillators [1] Serve As Ultrasensitive Detecmentioning

confidence: 99%

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

2012

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Nanomechanical oscillators have been employed as transducers to measure force, mass and charge with high sensitivity. They are also used in opto-or electromechanical experiments with the goal of quantum control and phenomena of mechanical systems. Here, we report the realization and operation of a hybrid monolithically integrated transducer system consisting of a high-Q nanomechanical oscillator with modes in the MHz regime coupled to the near-field of a high-Q optical whispering-gallery-mode microresonator. The transducer system enables a sensitive resolution of the nanomechanical beam's thermal motion with a signal-to-noise of five orders of magnitude and has a force sensitivity of 74 aN Hz −1/2 at room temperature. We show, both theoretically and experimentally, that the sensitivity of continuous incoherent force detection improves only with the fourth root of the averaging time. Using dissipative feedback based on radiation pressure enabled control, we explicitly demonstrate by detecting a weak incoherent force that this constraint can be significantly relaxed. We achieve a more than 30-fold reduction in averaging time with our hybrid transducer and are able to detect an incoherent force having a force spectral density as small as 15 aN Hz −1/2 within 35 s of averaging. This corresponds to a signal which is 25 times smaller than the thermal noise and would otherwise remain out of reach. The reported monolithic platform is an enabling step towards hybrid nanomechanical transducers relying on the light-mechanics interface. Nanomechanical oscillators [1] serve as ultrasensitive detectors of force [2], mass [3] and charge [4]. Recently, increasing efforts have been devoted to sensitively detect the nanomechanical motion of these oscillators [5][6][7][8] with recent systems exhibiting a sensitivity below that at the standard quantum limit (SQL) [9,10]. For sensitive force detection the requirements on displacement sensitivity are less stringent, though, because of the thermal limit. Recent work has demonstrated that trapped ions have also the potential to be employed as sensitive transducers for ultrasmall forces [11,12], with the force sensitivity reaching levels of only 5 yN Hz −1/2 [12]. While being a promising approach to detect specific small forces, it presently suffers from challenging technology required for ion trap experiments, stable interaction times being only in the millisecond range [11] and a lack of field-deployable sensors. In contrast, cantilever-based sensing is a well-established technique that allowed remarkable achievements such as the detection of single spins [13] and the reconstruction of the structure of a virus [14], and it is increasingly used in the emerging field of biosensing [15]. A particularly promising approach is to parametrically couple a nanomechanical oscillator to a microwave [9,16] or optical [17] microcavity, thus enhancing the displacement sensitivity and allowing to efficiently resolve the motion of cantilevers with dimensions below the diffraction limit. Previous real...

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Section: Nanomechanical Oscillators [1] Serve As Ultrasensitive Detecmentioning

confidence: 99%

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

2012

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“…GC-based PICs will help in realizing efficient and easy-to-use integrated spectrometers and sensors. Si 3 N 4 is a versatile HIC platform for its transparency at both visible and infrared wavelengths [7]- [9]. Besides it is compatible with the well established complementary-metal-oxide-semiconductor (CMOS) process technology thereby enabling low-cost photonic devices much like in silicon photonics.…”

Section: Introductionmentioning

confidence: 99%

Near-Infrared Grating Couplers for Silicon Nitride Photonic Wires

Subramanian

Selvaraja

Verheyen

et al. 2012

IEEE Photon. Technol. Lett.

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Abstract-Silicon nitride is a promising high-index material for dense photonic circuits and applications in the visiblemidinfrared wavelength regime. Design, fabrication, and optical characterization of silicon nitride waveguides at visible-nearinfrared wavelength are presented. Finally, design and experimental results are presented for the first time for linear and focused grating couplers (GCs) at near-infrared wavelength (900 nm) for plasma-enhanced chemical vapor deposition silicon nitride wires (220 × 500 nm) and compared with theoretical simulations. An experimental efficiency of 5.7 and 6.5 dB and 1-dB bandwidth of 26 and 40 nm are reported for the linear and focused GCs, respectively.

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“…However, because of a limited bandgap of 1.1 eV silicon is only transparent for wavelengths above 1,100 nm, excluding the entire visible wavelength range which is of major importance for applications in fluorescent imaging and biology. Therefore, alternative material systems with a wider bandgap, such as silicon nitride [15][16][17] , aluminium nitride 18,19 or gallium nitride 20,21 are attracting increasing interest in order to enlarge the wavelength operation range of nanophotonic devices. In addition, novel photonic materials such as diamond 22,23 offer further possibilities by combining a large bandgap of 5.45 eV with attractive material properties, such us high thermal conductivity, chemical inertness and biocompatibility.…”

mentioning

confidence: 99%

Diamond-integrated optomechanical circuits

et al. 2013

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Diamond offers unique material advantages for the realization of micro-and nanomechanical resonators because of its high Young's modulus, compatibility with harsh environments and superior thermal properties. At the same time, the wide electronic bandgap of 5.45 eV makes diamond a suitable material for integrated optics because of broadband transparency and the absence of free-carrier absorption commonly encountered in silicon photonics. Here we take advantage of both to engineer full-scale optomechanical circuits in diamond thin films. We show that polycrystalline diamond films fabricated by chemical vapour deposition provide a convenient wafer-scale substrate for the realization of high-quality nanophotonic devices. Using free-standing nanomechanical resonators embedded in on-chip Mach-Zehnder interferometers, we demonstrate efficient optomechanical transduction via gradient optical forces. Fabricated diamond resonators reproducibly show high mechanical quality factors up to 11,200. Our low cost, wideband, carrier-free photonic circuits hold promise for all-optical sensing and optomechanical signal processing at ultra-high frequencies.

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High confinement micron-scale silicon nitride high Q ring resonator

Abstract: We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3*10(6) operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.

Cited by 285 publications

References 13 publications

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

A hybrid on-chip optomechanical transducer for ultrasensitive force measurements

Near-Infrared Grating Couplers for Silicon Nitride Photonic Wires

Diamond-integrated optomechanical circuits

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