Ozone has much attention in many industrial fields. To materialize higher ozone generation efficiency, it is necessary to elucidate the relationship between discharge characteristics for discharge electrode system and ozone generation concentration. To clarify the improvement of mechanism on the multiple needle‐to‐plane configurations, the discharge characteristics and ozone generation characteristics for a multiple needle electrode system with various needle tip distances have been investigated. In this experiment, the maximum ozone yield at needle tip interval of d = 0.5 mm was improved by the minimum discharge power, the local maximal at d = 0.5 mm of discharge volume and the same ozone generation compared with those for d = 0 mm and d = 1 mm. © 2020 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.