2020
DOI: 10.1016/j.physc.2020.1353604
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High-efficiency deposition of 2-in. double-sided YBCO thin films in batch with pulsed inject MOCVD

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Cited by 4 publications
(3 citation statements)
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“…Two types of Mg-doped NdBCO thin films (300 nm), with and without the YBCO buffer layer (30 nm), were prepared on MgO substrates by Metal-Organic Chemical Vapor Deposition (MOCVD) method. 15 X-ray diffraction (XRD) patterns were recorded, and the in-plane alignments were detected by pole figure analysis. Studies on the thermal stability of Mg-doped NdBCO thin films were conducted under different T max by means of TSMG experiments on the SmBCO system.…”
Section: Methodsmentioning
confidence: 99%
“…Two types of Mg-doped NdBCO thin films (300 nm), with and without the YBCO buffer layer (30 nm), were prepared on MgO substrates by Metal-Organic Chemical Vapor Deposition (MOCVD) method. 15 X-ray diffraction (XRD) patterns were recorded, and the in-plane alignments were detected by pole figure analysis. Studies on the thermal stability of Mg-doped NdBCO thin films were conducted under different T max by means of TSMG experiments on the SmBCO system.…”
Section: Methodsmentioning
confidence: 99%
“…A solution to this problem is to grow 4-5 µm thick REBCO films on both sides of the substrate. Double-sided YBCO films up to 0.5 µm thickness have been demonstrated on 50 mm wafers by pulsed laser deposition and sputtering [18][19][20]. Recently, the ohmic heating technique has been used to fabricate double-sided Y(Gd)BCO coated conductor by MOCVD [21].…”
Section: Introductionmentioning
confidence: 99%
“…Функциональные материалы, в том числе пасты для 3D-печати сверхпроводящих деталей, для создания компонент электроники и электроэнергетики получают [5][6][7][8][9][10][11][12][13][14][15] в виде тонких пленок и покрытий, микро-и нанокристаллических керамик, текстурированных образцов и монокристаллов. В свою очередь тонкие пленки и покрытия получают осаждением из растворов или распылением керамических мишеней.…”
Section: Introductionunclassified