2017 IEEE International Electron Devices Meeting (IEDM) 2017
DOI: 10.1109/iedm.2017.8268487
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High efficiency direct liquid jet impingement cooling of high power devices using a 3D-shaped polymer cooler

Abstract: A novel 3D-shaped polymer multi-jet impingement cooler based on low cost fabrication techniques is introduced for high performance applications. This paper presents the modeling study, design, fabrication, experimental characterization and benchmarking of this cooling concept, showing a very good thermal performance with low required pumping power.

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Cited by 17 publications
(14 citation statements)
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“…Direct microjet impingement cooling shows great potential in high power devices or high-performance systems [1,2]. The post-impingement dynamics of the jet, specifically the interaction between the liquid fronts on the surface engendered by the jets is a critical criterion improving the heat transfer characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…Direct microjet impingement cooling shows great potential in high power devices or high-performance systems [1,2]. The post-impingement dynamics of the jet, specifically the interaction between the liquid fronts on the surface engendered by the jets is a critical criterion improving the heat transfer characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…In order to evaluate he performance of the jet impingement cooler, the thermal resistance and pumping power are both considered for the optimization. In the previous study [2], we illustrated the trade-off between thermal resistance and pump power: the thermal resistance can be further reduced by increasing the flow rate, however at the expense of the required pump power. In this work, the impact of the cooler geometry on the two objective values|(thermal resistance and pump power) is studied systematically.…”
Section: A Nozzle Array Scaling Analysismentioning
confidence: 99%
“…Thermal management of high performance electronic applications becomes more and more challenging, especially for three-dimensional (3D) chip stacks [1]. Liquid jet impingement cooling with a locally distributed return network is regarded as an efficient way to cool down the chip temperature [2]. In order to be compatible with the chip packaging process flow, different fabrication techniques were investigated to build chip level cooler with micron-size jet arrays, such as Si DRIE microfabrication [3], multilayer ceramic technology (MLC) [4] and lithography electroforming micro molding (LIGA) [5].…”
Section: Introductionmentioning
confidence: 99%
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“…In literature, detailed reports cover experimental, theoretical and numerical analyses of different impingement jet configurations. These configurations range from single submerged jet [5], to multiple submerged jets [6], and impinging jet cooling of electronic modules [7,8], configurations with common return [6] and with distributed returns [8]. However, limited experimental studies focus on chip level impingement jet cooling with locally distributed outlets due to the complicated internal cooler structures with sub-mm dimensions.…”
Section: Introductionmentioning
confidence: 99%