High efficiency grating couplers based on shared process with CMOS MOSFETs

Qiu, Chao; Sheng, Zhen; Li, Le; Pang, Albert; Aimin, WU; Wang, Xi; Zou, Shichang; Gan, Fuwan

doi:10.1088/1674-1056/22/2/024212

Chinese Phys. B

2013

DOI: 10.1088/1674-1056/22/2/024212

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High efficiency grating couplers based on shared process with CMOS MOSFETs

Chao Qiu¹,

Zhen Sheng²,

Le Li³

et al.

Abstract: High efficiency grating couplers based on shared process with CMOS MOSFETs * Qiu Chao(仇超) a)b)c) , Sheng Zhen(盛振) a) † , Li Le(李乐) b) , Albert Pang (彭树根) b) , Wu Ai-Min(武爱民) a) , Wang Xi(王曦) a) , Zou Shi-Chang(邹世昌) a)b) , and Gan Fu-Wan(甘甫烷) a) ‡ a) State

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Silicon Subwavelength Grating Coupler With Ultra-High Reproducibility, Ultra-Wide Bandwidth, and Ultra-Low Back Reflection

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High efficiency grating couplers based on shared process with CMOS MOSFETs

Cited by 1 publication

References 9 publications

Silicon Subwavelength Grating Coupler With Ultra-High Reproducibility, Ultra-Wide Bandwidth, and Ultra-Low Back Reflection

Silicon Subwavelength Grating Coupler With Ultra-High Reproducibility, Ultra-Wide Bandwidth, and Ultra-Low Back Reflection

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