2003
DOI: 10.1557/proc-770-i2.1
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High Efficiency Light Emission Devices in Silicon

Abstract: We report on the fabrication and performances of the most efficient Si-based light sources. The devices consist of MOS structures with erbium (Er) implanted in the thin gate oxide. The devices exhibit strong 1.54 μm electroluminescence at 300K with a 10% external quantum efficiency, comparable to that of standard light emitting diodes using III-V semiconductors. Emission at different wavelenghts has been achieved incorporating different rare earths (Ce, Tb, Yb, Pr) in the gate dielectric. The external quantum … Show more

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Cited by 11 publications
(8 citation statements)
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“…In the same year, STmicroelectronics in Italy fabricated a high efficient electroluminescent Er-doped device [21] similarly to what reported by the University of Catania [22].…”
Section: Introduction: Silicon Photonicsmentioning
confidence: 59%
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“…In the same year, STmicroelectronics in Italy fabricated a high efficient electroluminescent Er-doped device [21] similarly to what reported by the University of Catania [22].…”
Section: Introduction: Silicon Photonicsmentioning
confidence: 59%
“…Pure bulk Si 1% at 200 K [66] Porous silicon 0.37% [159] Si-nc in SiO2 0.03% [44,160] Si-nc in SiNy <10 −3 % [119,158] Er: Si-nc in SiO2 0.2% [21] C: Si-nc in SiO2 the nano-Si, where energetic electrons tunnel through the dielectric by a Fowler-Nordheim (F-N) process (Fig. 20).…”
Section: Methodsmentioning
confidence: 99%
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“…While the electrical properties of the Ce-ORSO and silicate thin films have not yet been explored, EL of Ce-doped SiO 2 MOSLEDs formed by implanting Ce into SiO 2 has been demonstrated [27][28][29]. As with ORSO samples, the authors report on the observation of luminescence from these samples in the absence of Si-ncs.…”
Section: Luminescence Of Rare Earth-doped Silicon-based Materialsmentioning
confidence: 99%
“…Photoluminescence (PL) from rare-earth (RE) ions doped silicon-based materials [1][2][3][4] including from various silicon nanoparticles (Si-NP), have attracted much attention owing to their promising applications in opto-electronic and photonic devices. One of these examples is amorphous Si-in-SiN x thin film containing dense Si-NP of variable size [5][6][7] and Si rich SiO 2 (SRSO) is probably the most extensively exploration [8][9][10].…”
Section: Introductionmentioning
confidence: 99%