2024
DOI: 10.1038/s41598-024-62336-0
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High-efficiency self-focusing metamaterial grating coupler in silicon nitride with amorphous silicon overlay

William Fraser,
Daniel Benedikovic,
Radovan Korcek
et al.

Abstract: Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. … Show more

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