High energy heavy ion beam lithography in silicon

Rout, B.; Dymnikov, Alexander D.; Zachry, Daniel P.; Eschenazi, Elia; Wang, Yongqiang Q.; Greco, Richard R.; Glass, Gary A.

doi:10.1016/j.nimb.2007.04.121

Cited by 6 publications

(3 citation statements)

References 15 publications

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“…13 In addition to utilizing these probes as analytical tools, recent progress has been made in the area of synthesis of high-aspect ratio nanostructures in materials. 14,15 Our current research involves development of new generation HEFIB nanoprobes based on magnetic and electrostatic focusing lens systems. 16,17 We have utilized the HEFIB nanoprobes to investigate the trace elemental distributions in biomedical systems and Si based electronic materials, as well as micro-fabrications in resists materials and Si wafers.…”

Section: Materials Analysis and Fabrication Using Ion Microprobesmentioning

confidence: 99%

ION BEAM MATERIALS ANALYSIS AND MODIFICATIONS AT keV TO MeV ENERGIES AT THE UNIVERSITY OF NORTH TEXAS

Rout

Dhoubhadel

Poudel

et al. 2014

Int. J. Mod. Phys. Conf. Ser.

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The University of North Texas (UNT) Ion Beam Modification and Analysis Laboratory (IBMAL) has four particle accelerators including a National Electrostatics Corporation (NEC) 9SDH-2 3 MV tandem Pelletron, a NEC 9SH 3 MV single-ended Pelletron, and a 200 kV CockcroftWalton. A fourth HVEC AK 2.5 MV Van de Graaff accelerator is presently being refurbished as an educational training facility. These accelerators can produce and accelerate almost any ion in the periodic table at energies from a few keV to tens of MeV. They are used to modify materials by ion implantation and to analyze materials by numerous atomic and nuclear physics techniques. The NEC 9SH accelerator was recently installed in the IBMAL and subsequently upgraded with the addition of a capacitive-liner and terminal potential stabilization system to reduce ion energy spread and therefore improve spatial resolution of the probing ion beam to hundreds of nanometers. Research involves materials modification and synthesis by ion implantation for photonic, electronic, and magnetic applications, micro-fabrication by high energy (MeV) ion beam lithography, microanalysis of biomedical and semiconductor materials, development of highenergy ion nanoprobe focusing systems, and educational and outreach activities. An overview of the IBMAL facilities and some of the current research projects are discussed.

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Section: Materials Analysis and Fabrication Using Ion Microprobesmentioning

confidence: 99%

ION BEAM MATERIALS ANALYSIS AND MODIFICATIONS AT keV TO MeV ENERGIES AT THE UNIVERSITY OF NORTH TEXAS

Rout

Dhoubhadel

Poudel

et al. 2014

Int. J. Mod. Phys. Conf. Ser.

Self Cite

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“…Generation of high energy well-collimated proton beams by relativistic intense lasers has attracted much interest in the past decade because its wide potential applications, such as proton oncology [1], medical isotope production [2], proton imaging [3], heavy-ion lithograph [4], as pre-accelerated bunch for injection into conventional accelerators [5], fast-ion ignition for inertial confinement fusion [6], etc. For cancer therapy, one needs 200~250MeV protons with ~1% energy spread and >10 10 s -1 flux [7].…”

Section: Introductionmentioning

confidence: 99%

Two-stage acceleration of protons from relativistic laser-solid interaction

Liu¹,

Sheng²,

Zheng³

et al. 2013

AIP Conference Proceedings

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A two-stage proton acceleration scheme using present-day intense lasers and a unique target design is proposed. The target system consists of a hollow cylinder, inside which is a hollow cone, which is followed by the main target with a flat front and dish-like flared rear surface. At the center of the latter is a tapered proton layer, which is surrounded by outer proton layers at an angle to it. In the first acceleration stage, protons in both layers are accelerated by target normal sheath acceleration. The center-layer protons are accelerated forward along the axis and the side protons are accelerated and focused towards them. As a result, the side-layer protons radially compress as well as axially further accelerate the front part of the accelerating center-layer protons in the second stage, which are also radially confined and guided by the field of the fast electrons surrounding them. Two-dimensional particle-incell simulation shows that a 79fs 8.5×10 20 W/cm 2 laser pulse can produce a proton bunch with ~ 267MeV maximum energy and ~ 9.5% energy spread, which may find many applications, including cancer therapy.

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“…Generation of high-energy well-collimated proton beams by relativistic intense lasers has attracted much interest in the past decade because its wide potential applications, such as proton oncology [1], medical isotope production [2], proton imaging [3], heavy-ion lithograph [4], as preaccelerated bunch for injection into conventional accelerators [5], fast-ion ignition for inertial confinement fusion [6], etc. For cancer therapy, one needs 200-250 MeV proton beams with $1% energy spread and !…”

Section: Introductionmentioning

confidence: 99%

Two-stage acceleration of protons from relativistic laser-solid interaction

Liu

Sheng

Zheng

et al. 2012

Phys. Rev. ST Accel. Beams

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A two-stage proton acceleration scheme using present-day intense lasers and a unique target design is proposed. The target system consists of a hollow cylinder with conical inner wall, which is followed by the main target with a flat front and a dishlike flared rear surface. At the center of the latter is a tapered proton layer, which is surrounded by side proton layers at an angle to it. In the first acceleration stage, protons in both layers are accelerated by target normal sheath acceleration. The center-layer protons are accelerated forward along the axis while the side protons are accelerated and focused towards them. As a result, the side-layer protons radially compress as well as axially further accelerate the front part of the center-layer protons in the second stage. Two-dimensional (2D) particle-in-cell (PIC) simulations show that a quasimonoenergetic proton bunch with the maximum energy over 250 MeV and energy spread $17% can be generated when such a target is irradiated with an 80 fs laser pulse with focused intensity 3:1 Â 10 20 W=cm 2 . Three-dimensional (3D) PIC simulation gives the reduced maximum energy $112 MeV but even smaller energy spread $3% under the same laser conditions due to anisotropic electron acceleration with linearly polarized lasers.

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High energy heavy ion beam lithography in silicon

Cited by 6 publications

References 15 publications

ION BEAM MATERIALS ANALYSIS AND MODIFICATIONS AT keV TO MeV ENERGIES AT THE UNIVERSITY OF NORTH TEXAS

ION BEAM MATERIALS ANALYSIS AND MODIFICATIONS AT keV TO MeV ENERGIES AT THE UNIVERSITY OF NORTH TEXAS

Two-stage acceleration of protons from relativistic laser-solid interaction

Two-stage acceleration of protons from relativistic laser-solid interaction

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