High entropy alloy thin films deposited by magnetron sputtering of powder targets

Braeckman, Bert; Boydens, Francis; Hidalgo, Hervé; Dutheil, Perrine; Jullien, Maud; Thomann, Anne-Lise; Depla, Diederik

doi:10.1016/j.tsf.2015.02.070

Cited by 105 publications

(42 citation statements)

References 45 publications

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“…However, with the rapid advancement of sputtering techniques, HEA film fabricated at nanoscale can now be employed as the optimal coating material. [23,32,33] Likewise, Lee et al has used the sputtering technique to successfully manufacture metallic glass nanolattices. [19] Additionally, the flexibility of two-photon lithography (TPL) allows countless number of different lattices with several orders of hierarchy and sizes to be fabricated.…”

Section: Introductionmentioning

confidence: 99%

High‐Entropy Alloy (HEA)‐Coated Nanolattice Structures and Their Mechanical Properties

et al. 2017

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Nanolattice structure fabricated by two-photon lithography (TPL) is a coupling of size-dependent mechanical properties at micro/nano-scale with structural geometry responses in wide applications of scalable micro/nano-manufacturing. In this work, three-dimensional (3D) polymeric nanolattices are initially fabricated using TPL, then conformably coated with an 80 nm thick high-entropy alloy (HEA) thin film (CoCrFeNiAl 0.3 ) via physical vapor deposition (PVD). 3D atomic-probe tomography (APT) reveals the homogeneous element distribution in the synthesized HEA film deposited on the substrate. Mechanical properties of the obtained composite architectures are investigated via in situ scanning electron microscope (SEM) compression test, as well as finite element method (FEM) at the relevant length scales. The presented HEA-coated nanolattice encouragingly not only exhibits superior compressive specific strength of %0.032 MPa kg À1 m 3 with density well below 1000 kg m À3 , but also shows good compression ductility due to its composite nature. This concept of combining HEA with polymer lattice structures demonstrates the potential of fabricating novel architected metamaterials with tunable mechanical properties.

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Section: Introductionmentioning

confidence: 99%

High‐Entropy Alloy (HEA)‐Coated Nanolattice Structures and Their Mechanical Properties

et al. 2017

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“…Among the methods for fabricating HEA films, sputtering is the most widely used because of its fast and efficient fabrication procedure [21,22]. For instance, AlCoCrCu 0.5 NiFe [23], AlCoCrCuFeNi [24], and CoCrFeCuNi HEA films [25] have previously been fabricated through sputtering, and their mechanical properties have been investigated. However, the mechanical characterizations of CoCrFeNiAl x film fabricated using the sputtering method has been little reported.…”

Section: Introductionmentioning

confidence: 99%

Microstructure, Mechanical and Corrosion Behaviors of CoCrFeNiAl0.3 High Entropy Alloy (HEA) Films

et al. 2017

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Abstract:The HEA-CoCrFeNiAl 0.3 thin film in this study has been successfully developed by radio frequency (RF) magnetron sputtering to meet the increasing demand in engineering applications. Its microstructure and surface profile were investigated accordingly. The as-synthesized HEA film was found to have a homogeneous element distribution and ultra-smooth surface, exhibiting a typical face-centered cubic (FCC) solid solution. The film showed better mechanical properties than its bulk counterpart, with a Young's modulus and hardness of~201.4 GPa and~11.5 GPa, respectively. Furthermore, corrosion tests demonstrated decreased sensitivity to localized corrosion in comparison to the commercial 304 stainless steel in NaCl solution.

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“…Thin film HEAs could be used as heat-or wear-resistant coatings, diffusion barriers [12] and hard coatings for cutting tools. Two of the most studied HEAs are the quinary CoCrCuFeNi alloy and the senary AlCoCrCuFeNi alloy [5,13,14,15,16,17,18,19]. The first alloy exhibits a single face-centered cubic (FCC) structure without precipitates or intermetallic phases.…”

Section: Introductionmentioning

confidence: 99%

Structure formation and properties of sputter deposited Nbx-CoCrCuFeNi high entropy alloy thin films

Braeckman

Depla

2015

Journal of Alloys and Compounds

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High entropy alloy thin films deposited by magnetron sputtering of powder targets

Cited by 105 publications

References 45 publications

High‐Entropy Alloy (HEA)‐Coated Nanolattice Structures and Their Mechanical Properties

High‐Entropy Alloy (HEA)‐Coated Nanolattice Structures and Their Mechanical Properties

Microstructure, Mechanical and Corrosion Behaviors of CoCrFeNiAl0.3 High Entropy Alloy (HEA) Films

Structure formation and properties of sputter deposited Nbx-CoCrCuFeNi high entropy alloy thin films

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