1995
DOI: 10.1109/16.464425
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High-f/sub max/ AlGaAs/InGaAs and AlGaAs/GaAs HBT's with p/sup +//p regrown base contacts

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Cited by 52 publications
(10 citation statements)
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“…High-speed GaAs-based HBTs [2] were adopted as active devices, because of their matured production technology. The HBT has an extrinsic base layer formed by epitaxial regrowth to reduce the base resistance and an InGaAs graded base layer to reduce the base transit time.…”
Section: Ingap-hbt Technologymentioning
confidence: 99%
See 1 more Smart Citation
“…High-speed GaAs-based HBTs [2] were adopted as active devices, because of their matured production technology. The HBT has an extrinsic base layer formed by epitaxial regrowth to reduce the base resistance and an InGaAs graded base layer to reduce the base transit time.…”
Section: Ingap-hbt Technologymentioning
confidence: 99%
“…We previously reported on analog and digital ICs (TIA, differential amplifier, and decision circuit) [1] for 40-Gbps systems using a matured GaAs-based InGaP HBT technology [2]. The first purpose of this paper is to develop other key ICs that utilize the microwave-circuit design techniques or configurations, i.e., a distributed amplifier, an analog phase shifter, clock (CLK) amplifiers for these systems, based on the same HBT technology.…”
Section: Introductionmentioning
confidence: 98%
“…One promising way to avoid these problems is to use heavily doped layer only in the extrinsic base region, since the extrinsic base resistance, including base contact resistance, is usually the dominant part of the total base resistance. While a selectively grown extrinsic base structure is effective for reducing the base resistance [1,2], it cannot directly reduce the basecollector capacitance. For this reason, it is desirable to overgrow the heavily doped extrinsic base on buried SiO 2 surrounding the collector pedestal since the dielectric constant of SiO 2 is much smaller than that of semiconductor material.…”
Section: Introductionmentioning
confidence: 99%
“…The measured peak fT and fwere 96 GHz and 240 GHz, respectively, for a 1.6 y m X 4.6 p m emitter. The AlGaAshGaAs HBT process has previously been described in detail [4] [5] [6]. The layer structure of the fabricated HBTs is shown in Table 1.…”
Section: Device Descriptionmentioning
confidence: 99%