High flowability monomer resists for thermal nanoimprint lithography

Toralla, K. Perez; Girolamo, J. de; Truffier-Boutry, Delphine; Gourgon, C.; Zelsmann, M.

doi:10.1016/j.mee.2009.01.014

Cited by 6 publications

(6 citation statements)

References 12 publications

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“…(1) and (2) are productivity-related requirements, and (3) and (4) are quality-related requirements. After a study by Chou et al [2], research on TH-NIL etching began to gather momentum, but most of it was focused on physical phenomena that occur during processing such as filling, the material properties of the substrate and other materials, stamp manufacturing, and the quality and applications of manufactured shapes [23][24][25][26][27][28][29][30]. Meanwhile, studies on hot plates were conducted as the development of TH-NIL equipment moved forward [31][32][33][34][35].…”

Section: Nil Methods Process Details Mold/substrate Resist Materialsmentioning

confidence: 99%

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Park¹,

Lee

2019

Applied Sciences

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A numerical study is conducted on the thermal performance of a large-area hot plate specifically designed as a heating and cooling tool for thermal nanoimprint lithography processes. The hot plate has the dimensions 240 mm × 240 mm × 20 mm, in which a series of cartridge heaters and cooling holes are installed. Stainless steel has been selected to endure the high molding pressures. A numerical model based on ANSYS Fluent is employed to predict the thermal behavior of the hot plate in both the heating and cooling phases. The proportional–integral–derivative (PID) thermal control of the device is modeled by adding user defined functions. The results of the numerical computations demonstrate that the use of cartridge heaters provides sufficient heat-up performance and the active liquid cooling in the cooling holes provides the required cool-down performance. However, a crucial technical issue is raised, namely that the proposed design poses a large temperature non-uniformity in the steady heating phase and in the transient cooling phase. As a remedy, a new hot plate in which heat pipes are installed in the cooling holes is considered. The numerical results show that the installation of heat pipes could enhance the temperature uniformity both in the heating and cooling phases.

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Section: Nil Methods Process Details Mold/substrate Resist Materialsmentioning

confidence: 99%

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Park¹,

Lee

2019

Applied Sciences

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“…As an example, with a 1000 mPa.s viscosity resist, a 13 bar pressure and an optimized initial resist thickness (final residual layer <20nm),themeanfreepath (or flowing distance) of a resist molecule was experimentally estimated to be about 1 mm [28]. This value is important for design of the mold, which has to exhibit homogeneous protrusion density (protrusion to cavity area ratio) on any 1 mm 2 areasonitssurfaceinordertofavorauniformresiduallayer .Inthisexample,the resist redistribution area was quite small but, when using lower viscosity resists (g 0 < 50 mPa.s), this area should reach almost the stamp size in the case of small stamps.…”

Section: Resist Flow In Thin Layersmentioning

confidence: 99%

Materials and Processes in UV‐Assisted Nanoimprint Lithography

Zelsmann

Boussey

2011

Generating Micro‐ and Nanopatterns on Polymeric Materials

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“…In‐situ polymerization of low viscosity monomer solution provides high flowability and redistribution within the mold cavities for full patterning. [ 18 ] In comparison, direct fabrication of particles from polymers involves heating the polymer to above its T g , at which it behaves as a viscous liquid and starts “flowing” and thereby conforming to the mold. [ 19 ] Highly entangled polymer chains and intermolecular forces between them at their melt state, inherent to polymers, increase their resistance to flow.…”

Section: Introductionmentioning

confidence: 99%

Micromolding of Thermoplastic Polymers for Direct Fabrication of Discrete, Multilayered Microparticles

Sadeghi

Sarmadi

et al. 2022

Small Methods

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Soft lithography provides a convenient and effective method for the fabrication of microdevices with uniform size and shape. However, formation of an embossed, connective film as opposed to discrete features has been an enduring shortcoming associated with soft lithography. Removing this residual layer requires additional postprocessing steps that are often incompatible with organic materials. This limits adaptation and widespread realization of soft lithography for broader applications particularly in drug discovery and drug delivery fields. A novel and versatile approach is demonstrated that enables fabrication of discrete, multilayered, fillable, and harvestable microparticles directly from any thermoplastic polymer, even at very high molecular weights. The approach, isolated microparticle replication via surface‐segregating polymer blend mold, utilizes a random copolymer additive, designed with a highly fluorinated segment that, when blended with the mold's matrix, spontaneously orients to the surface conferring an extremely low surface energy and nonwetting properties to the template. The extremely nonwetting properties of the mold are further utilized to load soluble biologics directly into the built‐in microwells in a rapid and efficient manner using an innovative screen‐printing approach. It is believed that this approach holds promise for fabrication of large‐array, 3D, complex microstructures, and is a significant step toward clinical translation of microfabrication technologies.

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High flowability monomer resists for thermal nanoimprint lithography

Cited by 6 publications

References 12 publications

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Materials and Processes in UV‐Assisted Nanoimprint Lithography

Micromolding of Thermoplastic Polymers for Direct Fabrication of Discrete, Multilayered Microparticles

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