High-frequency characterization for SAW interdigital transducers

Shin, Junggeun; Yoo, Hansoo; Seong, Minsang; Lee, Donghun; Eo, Yungseon

doi:10.1007/s40042-022-00613-9

J. Korean Phys. Soc.

2022

DOI: 10.1007/s40042-022-00613-9

|View full text |Cite

High-frequency characterization for SAW interdigital transducers

Junggeun Shin

Hansoo Yoo

Minsang Seong

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2024

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Single-Ended Surface Acoustic Wave Pressure Resonators

Hu,

Yuan,

et al. 2024

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

Surface acoustic wave (SAW) sensors exhibit advantageous attributes for pressure detection, including compact dimensions, cost-effectiveness, facile integration, elevated sensitivity, and a high quality factor (Q value). In this study, the single-ended resonant configuration of SAW pressure sensing element based on ST-X cut quartz was simulated and fabricated. The inﬂuence of the interdigitated transducer (IDT) and applied pressure on the resonance frequency of SAW were simulated and analyzed. The designed phase velocity (3159.344 m/s) without IDT is closest to the theoretical phase velocity (3158 m/s) of SAW propagation in the substrate, and the relative error is about 0.043%. The designed phase velocity of SAW dropped to 3149.198 m/s due to the loading of the IDT mass. With an increase in applied pressure from 0 to 350 kPa, the resonance frequency of the SAW decreases from 157.05 to 154.02 MHz, yielding a maximum linear pressure sensitivity of approximately 8.6 kHz/kPa. The measured center frequencies of the fabricated single-ended SAW devices are predominantly clustered around 157 MHz, exhibiting a deviation of 0.46 MHz from the simulated results. The present work establishes a foundation for subsequent experimental investigations into pressure sensing.

show abstract

Single-Ended Surface Acoustic Wave Pressure Resonators

Hu,

Yuan,

et al. 2024

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

High-frequency characterization for SAW interdigital transducers

Cited by 1 publication

References 21 publications

Single-Ended Surface Acoustic Wave Pressure Resonators

Single-Ended Surface Acoustic Wave Pressure Resonators

Contact Info

Product

Resources

About