High-Frequency Excitation for Thermal Imprint of Microstructures Into a Polymer

Narijauskaitė, Birutė; Palevičius, Arvydas; Narmontas, Pranas; Ragulskis, Minvydas; Janušas, Giedrius

doi:10.1111/j.1747-1567.2011.00724.x

Cited by 11 publications

(9 citation statements)

References 21 publications

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“…13 It was stated that polycarbonate is a suitable material for periodical microstructure's replication because of its physical properties, such as strength, ability to withstand scratches, and usability in high temperatures. The thermal, chemical, and physical properties of polycarbonate are shown in the Tables 2-4.…”

Section: Polycarbonatementioning

confidence: 99%

“…4(a)) is made of aluminum cylinder with a top surface and a piezoelectric ring. 13 The piezoelectric ring was bonded with epoxy to the inner surface of vibroactive pad. The piezoelectric material is excited to produce a vibrational response.…”

Section: Vibroactive Padsmentioning

confidence: 99%

“…8 Additionally, adding high-frequency vibrations can provide a possibility to increase the quality and accuracy of the replica. 13 Therefore the aim of this study is to analyze the influence of high-frequency excitation into quality of the replicated microstructure at different combinations of manufacturing regimes (temperature, pressure, and pressing time) using comparison of modeling results with experimental measurements of diffraction efficiencies. Different replication processes are compared by calculating coefficient of determination in order to find the most efficient parameters of periodical microstructure replication.…”

Section: Introductionmentioning

confidence: 99%

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Analysis of the Influence of High-Frequency Excitation Into Quality of the Replicated Microstructure

et al. 2015

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In the present research, surface relief diffraction gratings were fabricated and investigated. The purpose of this research was to determine the collection of parameters, which influence the diffraction efficiency most positively. For replication process ultrasonic thermal embossing was selected with different manufacturing regimes (time, pressure, and temperature). Diffraction efficiencies of periodical microstructures were measured experimentally. The results have shown increase of periodical microstructure quality with the help of high-frequency oscillations during manufacturing. Combination of pressing time, pressure, temperature, and vibrations improved the efficiency of replication process.

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Section: Polycarbonatementioning

confidence: 99%

Section: Vibroactive Padsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Analysis of the Influence of High-Frequency Excitation Into Quality of the Replicated Microstructure

et al. 2015

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“…RF heating has the advantages of rapid heating and cooling for fast patterning. 20 It also consumes substantially less electricity than thermal nanoimprinters do. The temperature increase depends heavily on the electric dipole of certain polymers.…”

confidence: 99%

Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors

Hsu

Lee

et al. 2017

AIP Advances

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We present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid temperature increases and cooling for NIL. Using a patterned nickel film as the mold, various nanostructures, such as nanowire, nanorod, and nanogrid arrays, were successfully fabricated within several seconds. For surface plasmon biosensing chips, the silver-coated nanowire arrays achieved a linewidth of 6.01 nm and wavelength sensitivity of 550 nm per refractive index unit. The functionality of the sensor was verified by observing the label-free antigen–antibody interactions.

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“…In pursuance to employ all the potential of high frequency phenomenon, operating parameters (frequency of excitation and voltage), under which pad reaches first resonant mode were found. Under these regimes higher amplitudes of vibrations are obtained, this forces preheated liquid polymer to flow, thereby filling empty gaps between master mold and microstructure [3][4][5][6][7][8]. The purpose of this paper is to determine how the quality parameters change, when newly designed vibroactive pad is used as supplementary measure.…”

Section: Introductionmentioning

confidence: 99%

Quality Analysis of Periodical Microstructures, Created By Using High Frequency Vibration Excitation

Šakalys¹,

Janušas

Palevičius

2014

Proceedings of International Electronic Conference on Sensors and Applications

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Periodical microstructure, which is being developed in this experiment is the main part of the sensor, whose purpose is biosensing of processes, such as analysis of concentration of micro particles in biological environment. The main part of sensor is diffraction grating, produced by the method of hot imprint. Therefore paper deals with the methodology for analysis and comparison of the quality of microstructures, created with and without high frequency excitation. Three types of measurements are performed: measurement of diffraction efficiency, optical microscopy and atomic force microscopy, in order to analyze the quality of replica. New generation vibroactive pad, whose fundament is stack type piezoactuator, is used to generate high frequency longitudinal vibrations. Thus preheated until glass-liquid transition state polymer, is forced to flow and the quality of microstructure is being enhanced. Both microstructures (with and without vibration excitation) are created on the surface of polycarbonate, using the same temperature, pressure and time modes. During the experiment periodic lamellar microstructure, whose period is 4 µm is being analyzed. Analysis of diffraction measurements was performed by using laser and photodiode BPW-34. The relative diffraction efficiency of second maxima of nickel mold is 10 %, of microstructure impressed, by using ultrasonic vibration diffraction efficiency is 9.27 % of microstructure, created without vibration excitation is equal to 4.2 %. Optical microscopy is employed in order to obtain images of magnified surface view, thus allowing detect defects like bubbles of residual gas and distortions, while atomic force microscopy is performed in order to find out surface parameters like period, depth, surface roughness and obtain profile view of created microstructure.

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High-Frequency Excitation for Thermal Imprint of Microstructures Into a Polymer

Cited by 11 publications

References 21 publications

Analysis of the Influence of High-Frequency Excitation Into Quality of the Replicated Microstructure

Analysis of the Influence of High-Frequency Excitation Into Quality of the Replicated Microstructure

Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors

Quality Analysis of Periodical Microstructures, Created By Using High Frequency Vibration Excitation

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