High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Guo, Yuanjun; Lv, Hongzhen; Li, Yifan; He, Xin; Zhou, Jian; Luo, Jikui; Zu, Xiaotao; Walton, A.J.; Fu, Yong Qing

doi:10.1063/1.4885038

Cited by 40 publications

(32 citation statements)

References 39 publications

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“…Additionally, for the applications in which it is desirable to minimize the interaction between solid and liquid to avoid surface erosion (for instance, wind turbine blades), this method can effectively be used. Moreover, the ability to clean and remove the impacting liquid droplet makes it possible to fabricate anti-contamination/ anti-bacteria surfaces using this method [40,60,61]. The ability to reduce the contact time of the droplet can also be used to control the heat transfer between solid and liquid, or for de-icing and anti-icing applications in airplane wings or wind turbine surfaces.…”

Section: Discussionmentioning

confidence: 99%

“…at a higher / ratio), SAW propagates longer distances within the liquid medium before significant attenuation. For the devices with a higher resonant frequency, the interaction volume between the SAW and liquid medium is decreased [61]. As a result, less momentum is transferred by SAW to the liquid medium during the impingement.…”

Section: Appendix B: Effect Of Saw Frequencymentioning

confidence: 99%

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Acoustic Waves for Active Reduction of Contact Time in Droplet Impact

Biroun

Tao

et al. 2020

Phys. Rev. Applied

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Minimising droplet impact contact time is critical for applications such as self-cleaning, antierosion or anti-icing. Recent studies have used texturing of surfaces to split droplets during impact or inducing asymmetric spreading, but these require specifically designed substrates which cannot be easily reconfigured. A key challenge is to realise an effective reduction in contact time during droplet impingement on a smooth surface without texturing but with an active and programmable control. Our experimental results show that surface acoustic waves (SAWs), generated at a location distant from a point of droplet impact, can be used to minimise contact time by as much as 35% without requiring a textured surface. Besides, the ability to switch on and off the SAWs means that reduction in droplet impact contact time on a surface can be controlled in a programmable manner. Moreover, our results show that by applying acoustic waves, the impact regime of the droplet on the solid surface can be changed from deposition or partial rebound to complete rebound. To study the dynamics of the droplet impact, we developed a numerical model for the multi-phase flow and simulated different droplet impingement scenarios. Numerical results revealed that the acoustic waves could be used to modify and control the internal velocity fields inside the droplet. By breaking the symmetry of the internal recirculation patterns inside the droplet, the kinetic energy recovered from interfacial energy during the retraction process is increased, and the droplet can be fully separated from the surface with a much shorter contact time. Our work opens up opportunities to use SAW devices to minimise the contact time, change the droplet impact regime and program/control the droplet's rebounding on smooth/planar and curved surfaces as well as rough/textured surfaces.

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Section: Discussionmentioning

confidence: 99%

Section: Appendix B: Effect Of Saw Frequencymentioning

confidence: 99%

Acoustic Waves for Active Reduction of Contact Time in Droplet Impact

Biroun

Tao

et al. 2020

Phys. Rev. Applied

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“…With thin-film integration with many substrates including silicon, glass, metal plates/foils and polymer plastics reported, great designs and application flexibility are possible [25][26][27]. Recently, significant jetting and nebulization were reported using SAW devices made of sputtered ZnO films on silicon substrates [28][29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Nebulization using ZnO/Si surface acoustic wave devices with focused interdigitated transducers

Zhou

Zhang

Luo

et al. 2019

Surface and Coatings Technology

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Propagation of surface acoustic waves (SAWs) on bulk piezoelectric substrates such as LiNbO3 and quartz, exhibits an in-plane anisotropic effect due to their crystal cut orientations. Thin film SAW devices, such as those based on ZnO or AlN, offer potential advantages, including isotropic wave velocities in all in-plane directions, higher power handling capability, and potentially lower failure rates. This paper reports experimental and simulation results of nebulization behaviour for water droplets using ZnO/Si surface acoustic wave devices with focused interdigital transducers (IDTs). Post-deposition annealing of the films at various temperatures were applied to improve the quality of the sputtering-deposited ZnO films, and 500 °C was found to be the optimal annealing temperature. Thin film ZnO/Si focused SAW devices were fabricated using the IDT designs with arc angles ranging from 30° to 90°.

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“…Recently, surface acoustic wave devices have been successfully used in various applications, such as radio frequency (RF) communication [ 1 ], chemical and biochemical sensors [ 2 , 3 ], and optical modulators [ 4 ]. Nowadays, there has been an increased interest in SAW-based microfluidics applications due to the leakage phenomenon of Rayleigh surface acoustic waves (R-SAWs) in liquids [ 5 , 6 , 7 ]. The leaky phenomenon can be exploited to speed up biochemical reactions [ 8 ], minimize nonspecific bio-bonding [ 9 ], and accelerate hybridization rations in protein and DNA analysis [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors

Wang

et al. 2017

Sensors

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Abstract:In this paper, we report attenuation characteristics of aluminum nitride (AIN) film-based surface acoustic waves (SAWs) in liquids and their potential as liquid ethanol sensors. An AIN film-based SAW resonator was fabricated for liquid sensing application. The fabricated SAW device had a Rayleigh wave mode at a resonant frequency of 147.1 MHz and a low temperature coefficient of frequency (TCF) of −21.7 ppm/K. The signal attenuation in the transmission line of the SAW device was presented when ethanol (ETH) droplets and deionized water (DIW) with different concentrations and volume (0.2-1 µL) were dropped on the sensing area respectively. The attenuation of SAW as a function of time and liquid position was investigated. Residues left on the wave propagation path resulted in a frequency shift of the SAW device after liquid evaporation. For ETH, there was a 49 kHz frequency shift caused by a large amount of residues, while the frequency shift of DIW was not distinct, on account of a clean surface. The linear relationship between evaporation rate and ethanol concentration was demonstrated. The evaporation rate of ethanol droplets showed good consistency, and the evaporation time variation was less than 5% at each concentration level. Therefore, the proposed SAW device had great potentials to determine ethanol concentrations based on evaporation rate.

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High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Cited by 40 publications

References 39 publications

Acoustic Waves for Active Reduction of Contact Time in Droplet Impact

Acoustic Waves for Active Reduction of Contact Time in Droplet Impact

Nebulization using ZnO/Si surface acoustic wave devices with focused interdigitated transducers

A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors

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