Solar
blind photodetectors with a cutoff wavelength within the
200–280 nm region is attracting much attention due to their
potential civilian and military applications. The avalanche photodetectors
(APDs) formed based on wide-bandgap semiconductor Ga2O3 are expected to meet emerging technological demands. These
devices, however, suffer from limitations associated with the quality
of as-grown Ga2O3 or the difficulty in alleviating
the defects and dislocations. Herein, high-performance APDs incorporating
amorphous Ga2O3 (a-Ga2O3)/ITO heterojunction as the central element have been reliably fabricated
at room temperature. The a-Ga2O3-based APDs
exhibits an ultrahigh responsivity of 5.9 × 104 A/W,
specific detectivity of 1.8 × 1014 Jones, and an external
quantum efficiency up to 2.9 × 107% under 254 nm light
irradiation at 40 V reverse bias. Notably, the gain could reach 6.8
× 104, indicating the outstanding capability for ultraweak
signals detection. The comprehensive superior capabilities of the
a-Ga2O3-based APDs can be ascribed to the intrinsic
carrier transport manners in a-Ga2O3 as well
as the modified band alignment at the heterojunctions. The trade-off
between low processing temperature and superior characteristics of
a-Ga2O3 promises greater design freedom for
realization of wide applications of emerging semiconductor Ga2O3 with even better performance since relieving
the burden on the integration progress.