“…For hard X-ray monochromators, the crystal thermal deformation would not only broaden the rocking curve, resulting in flux loss and worse energy resolution, but also deform the wavefront, which has a negative impact on beam angular divergence and coherence preservation. In order to remove the high heat loads efficiently and improve optical performance, several liquid nitrogen (LN2) cooled silicon crystal monochromators have been applied successfully at high heat loads since the early 1990s (Lee et al, 1995;Mochizuki et al, 1995;Shastri et al, 2002;Wang et al, 2010;Stimson et al, 2019), owing to the combined advantages of high thermal conductivity and low thermal expansion coefficient at cryogenic temperatures for silicon crystal (Zhang, 1993;Lee et al, 2000Lee et al, , 2001. Subsequently, extensive research has been conducted successively on high-heat-load monochromator cooling techniques (Cao et al, 2011;Khorunzhii et al, 2003).…”