High-<i>Q</i>/<i>V</i> Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

Khanaliloo, Behzad; Mitchell, Matthew; Hryciw, Aaron C.; Barclay, Paul E.

doi:10.1021/acs.nanolett.5b01346

Cited by 138 publications

(118 citation statements)

References 47 publications

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“…For instance, Kuo et al [86] have exploited the high nonlinear susceptibility of gallium arsenide to generate a WGM second-harmonic spectrum ( Figure 8A), while Haigh et al [90] have enhanced Brillouin scattering by tuning of a magneto-optical yttrium iron garnet spherical cavity system. Recent materials/complexes of choice include diamond ( Figure 8B) [87], constrained germanium-tin alloy ( Figure 8C) [88], crystalline lithium niobate ( Figure 8D) [89], high-Q magnesium fluoride [91], or caesium lead halide perovskite-coated silica [92]. There are also magneto-and electrostrictive materials that suffer deformations from an applied field [93] and some isotropic crystalline platforms whose thermal characteristics enable nano-Kelvin thermometry, e.g.…”

Section: Potential Materialsmentioning

confidence: 99%

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

et al. 2017

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Nanophotonic device building blocks, such as optical nano/microcavities and plasmonic nanostructures, lie at the forefront of sensing and spectrometry of trace biological and chemical substances. A new class of nanophotonic architecture has emerged by combining optically resonant dielectric nano/microcavities with plasmonically resonant metal nanostructures to enable detection at the nanoscale with extraordinary sensitivity. Initial demonstrations include single-molecule detection and even single-ion sensing. The coupled photonic-plasmonic resonator system promises a leap forward in the nanoscale analysis of physical, chemical, and biological entities. These optoplasmonic sensor structures could be the centrepiece of miniaturised analytical laboratories, on a chip, with detection capabilities that are beyond the current state of the art. In this paper, we review this burgeoning field of optoplasmonic biosensors. We first focus on the state of the art in nanoplasmonic sensor structures, high quality factor optical microcavities, and photonic crystals separately before proceeding to an outline of the most recent advances in hybrid sensor systems. We discuss the physics of this modality in brief and each of its underlying parts, then the prospects as well as challenges when integrating dielectric nano/microcavities with metal nanostructures. In Section 5, we hint to possible future applications of optoplasmonic sensing platforms which offer many degrees of freedom towards biomedical diagnostics at the level of single molecules.

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Section: Potential Materialsmentioning

confidence: 99%

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

et al. 2017

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“…A key advantage of the hybrid platform is fabrication scalability. Specifically, diamond waveguides require either undercutting of the diamond [18,19] or working with thin diamond membranes on a low index substrate [20,21]. Undercutting requires a threedimensional dry etch, significantly constraining the device layout.…”

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confidence: 99%

Efficient Extraction of Zero-Phonon-Line Photons from Single Nitrogen-Vacancy Centers in an Integrated GaP-on-Diamond Platform

et al. 2016

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Scaling beyond two-node quantum networks using nitrogen vacancy (NV) centers in diamond is limited by the low probability of collecting zero phonon line (ZPL) photons from single centers. Here, we demonstrate GaP-on-diamond disk resonators which resonantly couple ZPL photons from single NV centers to single-mode waveguides. In these devices, the probability of a single NV center emitting a ZPL photon into the guided waveguide mode after optical excitation can reach 9%, due to a combination of resonant enhancement of the ZPL emission and efficient coupling between the resonator and waveguide. We verify the single-photon nature of the emission and experimentally demonstrate both high in-waveguide photon numbers and substantial Purcell enhancement for a set of devices. These devices may enable scalable integrated quantum networks based on NV centers.

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“…In Figure 4, we show scanning electron microscopic images and details of nanophotonics components fabricated in single crystal diamond 10,50,[53][54][55] . Among the optical resonators described in the following sections, we show those currently achieving the highest Q s at specific wavelengths in the near infrared and in the visible spectrum at around 637 nm.…”

Section: Nanophotonics Componentsmentioning

confidence: 99%

Advances in diamond nanofabrication for ultrasensitive devices

Castelletto

Rosa

Blackledge³

et al. 2017

Microsyst Nanoeng

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This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies. INTRODUCTIONDiamond is an ideal platform for nano-and microfabrication leading to a range of robust sensors. This is due to the outstanding mechanical and wide spectral optical transparency of diamond, combined with biocompatibility and lack of toxicity in both bulk and nanostructures. Moreover, diamond can be fabricated with high purity and control using chemical vapor deposition. However, due to its hardness and cost, some of its applications in nanomechanics, optomechanics and nanophotonics reside mainly in its polycrystalline or nanocrystalline forms, which do not always retain the nuance of the outstanding properties of monocrystalline diamond.A recent review 1 describes diamond optical and mechanical properties compared to other materials currently used for optomechanical components (Si, Si 3 N 4 , SiC, and α-Al 2 O 3 ), showing that, in principle, there are more favorable properties of diamond for nanomechanical and optomechanical realizations. Therefore, a considerable effort has been taking place over the last five years to exploit these properties in a wide spectrum of diamond nanosystems. To date, single crystal diamond utilization for nanomechanical components 2 , (for example, nano electromechanical systems (NEMS) and micro electro-mechanical systems (MEMS)), as well for nanophotonics 3,4 compared to above mentioned materials, has been limited due to its growth requirements. In fact, a single crystal diamond cannot be grown on any other substrate than itself. This prevents wafer-scale processing and it represents a challenge in the application of conventional diamond nanofabrication methods. On the other hand, polycrystalline diamond films, which can be grown in high quality from 4 to 6 inches' wafers 5 , permit to fabricate optomechanical components with quality factors and oscillation frequencies rivaling single crystal diamond 6 .

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High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

Cited by 138 publications

References 47 publications

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

Advances in optoplasmonic sensors – combining optical nano/microcavities and photonic crystals with plasmonic nanostructures and nanoparticles

Efficient Extraction of Zero-Phonon-Line Photons from Single Nitrogen-Vacancy Centers in an Integrated GaP-on-Diamond Platform

Advances in diamond nanofabrication for ultrasensitive devices

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