High-<i>Q</i> Resonator–Inductor Using LiNbO₃ Plate for Frequency Tuning in 1–5 GHz

Wu, Shuxian; Wu, Zonglin; Bao, Feihong; Zou, Jie

doi:10.1109/tuffc.2022.3172275

Cited by 8 publications

References 29 publications

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Piezoelectric Energy Harvesting: From Fundamentals to Advanced Applications

Bhatnagar,

Yadav,

Kumar

et al. 2024

Energy Tech

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Piezoelectric energy harvesting (PEH) has surfaced as an innovative technology for supplying power to low‐power electronic devices by converting mechanical energy into electrical energy. This technology utilizes the piezoelectric effect, in which specific materials produce an electric charge when they experience mechanical stress. Piezoelectric materials can be categorized into three main types: single crystal, composite, and polymeric. Single‐crystal materials exhibit elevated piezoelectric coefficients and stability; however, they tend to be costly and fragile. Composite materials integrate piezoelectric ceramics with polymer matrices, enhancing flexibility and lowering costs. Polymeric materials exhibit lightweight, flexible, and biocompatibility characteristics, rendering them ideal for wearable and implantable applications. Although PEH presents considerable promise, it is essential to tackle challenges, including low power output, material constraints, and environmental influences. Future investigations will focus on creating innovative materials that exhibit improved piezoelectric characteristics, refining device architecture for optimal energy conversion, and incorporating piezoelectric harvesting technology into intelligent systems. By addressing these challenges and investigating creative solutions, PEH can significantly advance sustainable and self‐powered electronic devices.

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Piezoelectric Energy Harvesting: From Fundamentals to Advanced Applications

Bhatnagar,

Yadav,

Kumar

et al. 2024

Energy Tech

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High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Zhang,

Wang,

Zhang

et al. 2023

Semicond. Sci. Technol.

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This work aims to solve the problem of tradeoff between various properties and spurious mode suppression in surface acoustic wave (SAW) resonators. A high-angle rotated Y-cut LiNbO3(LN)/SiO2/Si multilayered structure was proposed to balance the electromechanical coupling coefficient (K 2) and temperature coefficient of frequency (TCF), and the propagation characteristics of Rayleigh mode were simulated by the finite element method. For the widely existing spurious modes, the shear-horizontal wave and longitudinal modes were eliminated by optimizing the cut angle of LN and electrode thickness, and a method of double-layer electrode transverse modulation was proposed to suppress the transverse modes. This method reduces the mass loading effect by replacing the electrode from Cu to Cu/Al. Moreover, the Al thicknesses in different regions are changed to perform the transverse modulation, and thus a widespread suppression of transverse modes is achieved by exciting the piston mode and enhancing the energy constraint, with a significant improvement on quality factor at the resonance frequency. Eventually, the spurious-free SAW resonator has the K 2 of 9.5% and the TCF close to zero. This work provides a feasible scheme for the design of high performance SAW resonators with spurious mode suppression.

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High Order Rayleigh-Type SAW Devices for Advanced 5G Front-ends with Improved Performance

Liu,

Zhang,

Sun

et al. 2024

J. Phys.: Conf. Ser.

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This paper presents a piezoelectric layered structure composed of a rotated LiNbO3 thin film combined with a diamond film for improved comprehensive performance SAW devices. Theoretical analysis of SAW resonator on the proposed structure is performed to calculate its SAW characteristics including electromechanical coupling coefficient (K2 ), frequency (f), and quality factor (Q). It is found that a high-order Rayleigh mode is effectively excited and exhibits not only high frequency but also large K2 and high Q. The influences of the Euler angles, layer stack configurations of LiNbO3, and the electrode on the SAW properties are investigated systematically to optimize the device performance of the proposed structure. The results show the resonator can operate at frequency of 6.6 GHz with a large K2 of 13.58% and high Q of 2134, which makes the proposed layered structure a good potential solution for high-performance wideband SAW filters operating over 5 GHz.

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High-Q Resonator–Inductor Using LiNbO₃ Plate for Frequency Tuning in 1–5 GHz

Cited by 8 publications

References 29 publications

Piezoelectric Energy Harvesting: From Fundamentals to Advanced Applications

Piezoelectric Energy Harvesting: From Fundamentals to Advanced Applications

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

High Order Rayleigh-Type SAW Devices for Advanced 5G Front-ends with Improved Performance

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