High‐induction nanocrystalline soft magnetic Fe_XTi_YB_Z films prepared by magnetron sputtering

Abstract

To design films with the Fe/TiB2 nanocomposite structure, which are characterized by high saturation induction Bs, the phase and structural states and static magnetic properties of Fe‐TiB2 films prepared by magnetron sputtering and subjected to subsequent annealing have been studied. According to X‐ray diffraction data, either amorphous or nanocrystalline single‐phase structure (an α‐Fe(Ti,B) supersaturated solid solution with a bcc crystal lattice) is formed in the as‐sputtered films. Depending on the film composition, the grain size of the α‐Fe(Ti,B) phase varies from 45.6 to 6.5 nm; grains are characterized by high microstrain (0.21‐4.96%). The annealing at 200‐500 °C leads to a decrease in the lattice parameter of the α‐Fe(Ti,B) phase, i.e. to its depletion of titanium and boron and to the formation of two‐phase α‐Fe + Fe3B structure after annealing at 500 °C. The annealing at 200‐500 °C almost does not affect the grain size and microstrain of the bcc α‐Fe‐based phase. The amorphous state of the films is stable up to 500 °C. All studied films are ferromagnets; the saturation induction Bs(0.95‐2.13 T) and coercive field Hc (0.4‐5 kA/m) of the films were determined. Correlations between the Bs and Hc magnitudes and the chemical composition of the films, their phase and structural states and magnetic structure are discussed. (© 2016 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Residual Stresses in Soft Magnetic FeTiB and FeZrN Films Obtained by Magnetron Deposition

“…Films of Fe-Ti-B and Fe-Zr-N system alloys with two-phases nanocrystalline structure (TiB 2 boride or ZrN nitride particles located in the main soft magnetic αFe phase), which are produced by magnetron deposition followed by annealing (300-500 • C), are able to ensure the combination of high saturation induction (B s~2 T) and low coercive field (H c < 1 Oe) [1,2].…”

Static and high-frequency magnetic properties of nanocrystalline Fe-Zr-N films

“…The measured μ' values qualitatively obey the relationship μ' = Ms/Heff. Note that the Fe-Zr-N films, in particular, Fe89-88Zr10N11-12 [11,15], have the substantially higher Ms values as compared to those of the films studied in the present work, which reach 1.8-1.9 T. For the films with Ms =1.8-1.9 T, the higher fr value and the higher permeability μ' = Ms/Heff can be expected.…”

“…1a). According to our previous magnetic studies [15], the Fe-Zr-N films with the amorphous structure, which gives a wide reflection in X-ray diffraction patterns, consist of α-Fe-based ferromagnetic grains less than 2 nm in size.…”

FeZrN Films: Magnetic and Mechanical Properties Relative to the Phase-Structural State

“…Since the early 2000s, the authors of the presented work have been carried out studies of the Fe-Me IVa -X system soft-magnetic films (Fe-Zr-C, Fe-Zr-N and Fe-Ti-B) [21][22][23][24][25][26][27][28][29][30][31], wherein the large amount of systematic and comprehensive experimental data on Fe-Zr-N films were obtained [24][25][26][27][28][29][30][31]. The studied film compositions were chosen using the physical-chemical approach to the alloy design in order to ensure the formation of a twophase structure (αFe-based phase + MeX) under appropriate preparation conditions of the film [32].…”