High-Intensity Implantation With an Ion Beam’s Energy Impact on Materials

Ryabchikov, A. I.

doi:10.1109/tps.2021.3073942

Cited by 18 publications

(9 citation statements)

References 59 publications

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“…This improves focusing and the ion current density exceeds to 0.06 A/cm 2 , which corresponds to an increase in the ion current density compared to the injection current density by almost 400 times. However, the power density of such a beam does not exceed 2.5 kW/cm 2 , which does not provide the possibility of realizing the synergy of high-intensity ion implantation and its simultaneous energy impact on the surface in accordance with the method described in [7]. An increase in the injection current to 0.3 A and in the ion current density to 1.2•10 -3 A/cm 2 significantly changes the situation.…”

Section: Simulation Of Ion Beam Transport In the Absence Of Its Space...mentioning

confidence: 98%

“…The advantages of the low-energy high-intensity ion implantation (LEHI 3 ) method, providing deep ion doping of materials, are leveled in a number of promising applications by heating the entire sample to high temperatures, at which a significant increase in the material grain structure is observed. A study [7] describes a new method aimed at solving this problem. The essence of the method lies in the use for high-intensity implantation of ion beams with micro-submillisecond duration with a power density from tens to several hundreds of kilowatts per square centimeter.…”

Section: Introductionmentioning

confidence: 99%

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Numerical simulation of the features and regularities of the high-power density ion beam formation

Ryabchikov¹,

Тараканов²

2022

8th International Congress on Energy Fluxes and Radiation Effects

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The development of methods to modify materials based on the synergy of high-intensity implantation and simultaneous energy exposure is intended at creating deep ion-doped layers. For this purpose, it is proposed to use pulsed and repetitively-pulsed beams of metal and gas ions with micro- submillisecond duration with a high-pulsed power density. The paper presents the results of numerical simulation of the pulsed and repetitively-pulsed high-intensity ion beam formation. Simulations were performed using the Karat code. The ballistic focusing of heavy ions was studied at injection current from 0.1 to 1 A. The influence of the ion current density, accelerating voltage, ion charge composition, and conditions for neutralizing the beam space charge on the high-power ion beam transport and focusing has been studied. The conditions for the virtual anode appearance have been determined and studied. It has been found that for long durations of ion beam formation at low pressures of the residual atmosphere, multiple appearance and disappearance of a virtual anode is possible. The possibility of ballistic formation of ion beams with a pulse density of hundreds of kilowatts per square centimeter is shown.

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Section: Simulation Of Ion Beam Transport In the Absence Of Its Space...mentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Numerical simulation of the features and regularities of the high-power density ion beam formation

Ryabchikov¹,

Тараканов²

2022

8th International Congress on Energy Fluxes and Radiation Effects

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“…A new method described in [10] is aimed at solving the problem of maintaining the advantages of high-intensity implantation with simultaneous elimination of high-temperature degradation of the irradiated target microstructure. The essence of the method lies in the use for high-intensity implantation of ion beams with micro-or submillisecond duration with a power density from tens to several hundreds of kilowatts per square centimeter.…”

Section: Introductionmentioning

confidence: 99%

High-intensity ion beams with submillisecond duration for synergistic of ion implantation and energy impact on the surface

Ryabchikov¹,

Sivin²,

Dektyarev³

2022

8th International Congress on Energy Fluxes and Radiation Effects

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The development of methods to modify materials based on the synergistic high-intensity implantation and simultaneous energy impact on the ion-doped layer involves using the pulsed and repetitively-pulsed beams of metal and gas ion beams with micro-submillisecond duration with high pulsed power density. The paper presents the results of experimental studies on the formation of pulsed and repetitively-pulsed high-intensity beams of titanium ions with a pulse duration from 150 to 500 μs. The plasma flow was generated by a vacuum arc discharge. To obtain ion beams with a power density in the range from several tens to several hundreds of kilowatts per square centimeter, ballistic focusing of ions was used using an extracting grid electrode in the form of a part of a sphere. The features of the forming the high-power repetitively-pulsed beams of titanium ions were studied using both the ion source “Rainbow 5”. Data are presented on the influence of the ion beam space charge neutralization processes at current densities from fractions to several amperes per square centimeter on the efficiency of the ion beam’s transport and focusing at accelerating voltages from 10 to 30 kV.

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“…В этой связи, необходим другой подход, при котором приповерхностный слой обрабатываемого изделия будет ионномодифицирован при облучении, а основная часть материала не подвергнется воздействию высоких температур. Такой метод можно реализовать за счет синергии высокоинтенсивной ионной имплантации, обеспечивающей ионное легирование металлов и сплавов на глубинах, на порядки превышающие проективные пробеги ионов за счет радиационно-усиленной диффузии атомов, и импульсно-периодического энергетического воздействия на приповерхностный слой, способствующего управляемому изменению структурно-фазового состояния ионно-легированных слоев с сохранением структуры и свойств матричного материала [7]. Для реализации метода высокоинтенсивной имплантации ионов с одновременным энергетическим воздействием на приповерхностный слой предполагается использовать импульсный или импульсно-периодический пучок субмиллисекундной длительности.…”

Section: Introductionunclassified

Моделирование Температурных Полей В Мишенях При Совмещении Импульсно-Периодической Высокоинтенсивной Имплантации Ионов И Энергетическом Воздействии На Поверхность

Ivanova¹,

Sivin²,

Корнева³

et al. 2022

8th International Congress on Energy Fluxes and Radiation Effects

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Методы модификации поверхностных и приповерхностных слоев материалов и покрытий ионными пучками находят применение во многих областях науки и техники. Метод высокоинтенсивной имплантации пучками ионов высокой плотности мощности субмиллисекундной длительности предполагает значительный импульсный разогрев приповерхностного слоя, облучаемой мишени, с последующим быстрым его охлаждением за счет отвода тепла внутрь материала благодаря теплопроводности и реализацию импульсно- периодической радиационно-усиленной диффузии атомов на глубины, превышающие проективный пробег ионов. В работе методом численного моделирования исследуется динамика изменения температурных полей в мишенях при одноимпульсном и импульсно- периодическом воздействиях пучков ионов субмиллисекундной длительности с импульсной плотностью мощности до 35 кВт/см2. При моделировании используются различные материала мишени, существенно отличающиеся по своим характеристикам. Определены условия, при которых в ионно-легируемом слое значение температуры будет соответствовать условиям радиационно-стимулированной диффузии имплантируемого элемента, а температура в матричном материале не приведет к ухудшению его микроструктуры и свойств.

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High-Intensity Implantation With an Ion Beam’s Energy Impact on Materials

Cited by 18 publications

References 59 publications

Numerical simulation of the features and regularities of the high-power density ion beam formation

Numerical simulation of the features and regularities of the high-power density ion beam formation

High-intensity ion beams with submillisecond duration for synergistic of ion implantation and energy impact on the surface

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