2016
DOI: 10.1109/tcpmt.2016.2606434
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High- $k$ Thin-Film Capacitors With Conducting Oxide Electrodes on Glass Substrates for Power-Supply Applications

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Cited by 7 publications
(3 citation statements)
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“…In contrast, recent studies have demonstrated high capacitance density in the range of 1–3 µF cm −2 with sputtering as technology for the deposition of the dielectric material . For example, Gandhi et al achieved a capacitance density of 1.3 µF cm −2 with sputtered Ba(Sr)TiO 3 thin films . A higher value of 2.5 µF cm −2 was obtained by Shibuya et al, for SrTiO 3 thin film capacitor integrated on a silicon interposer .…”
Section: Introductionmentioning
confidence: 96%
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“…In contrast, recent studies have demonstrated high capacitance density in the range of 1–3 µF cm −2 with sputtering as technology for the deposition of the dielectric material . For example, Gandhi et al achieved a capacitance density of 1.3 µF cm −2 with sputtered Ba(Sr)TiO 3 thin films . A higher value of 2.5 µF cm −2 was obtained by Shibuya et al, for SrTiO 3 thin film capacitor integrated on a silicon interposer .…”
Section: Introductionmentioning
confidence: 96%
“…In this context, intensive research works aim to integrate passive components using low‐cost technologies, as close as possible to the chip on the interposer. Among the numerous passive component technologies and their current associated electrical performances, an extensive research is carried out for the integration of high capacitance density decoupling capacitors, to compensate spontaneous voltage fluctuations generated by DC voltage supply of ICs . To reach such a high capacitance density, the relative permittivity (ϵnormalr ) of the dielectric material must be maximized (>200 at 1 MHz) while keeping the film as thin as possible (<500 nm).…”
Section: Introductionmentioning
confidence: 99%
“…A physics-offailure (PoF) based reliability prediction methodology has been developed to estimate the failure rate distribution of electrolytic capacitors in LED drivers [13]. In recent years, many electrolytic capacitor-free topologies have been developed with more reliable components [16][17][18], including thin film capacitors [19] and LC filters [18]. In addition, several new control technologies can also improve the lifetime of electrolytic capacitors, for instance, the resonance-assisted filter [20] and the variable on-time control method [21].…”
Section: Introductionmentioning
confidence: 99%