2017
DOI: 10.1109/led.2017.2687440
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High-Linearity AlGaN/GaN FinFETs for Microwave Power Applications

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Cited by 92 publications
(42 citation statements)
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“…The source‐drain distance ( L sd ), gate length ( L g ), fin length ( L fin ), and fin height ( H fin ) are 3.5 μm, 200 nm, 200 nm, and 40 nm, respectively. In this paper, the fin length and the gate length are designed to be equal and the fin body is aligned with the gate metal based on the self‐aligned process technology for the pursuit of a better on‐state performance . As shown in Figure A, for the fin‐shaped AlGaN/GaN HEMTs with trigate structure, the fin body is wrapped around by the gate metal on the top and two sidewalls.…”
Section: Device Structure and Modelmentioning
confidence: 99%
See 1 more Smart Citation
“…The source‐drain distance ( L sd ), gate length ( L g ), fin length ( L fin ), and fin height ( H fin ) are 3.5 μm, 200 nm, 200 nm, and 40 nm, respectively. In this paper, the fin length and the gate length are designed to be equal and the fin body is aligned with the gate metal based on the self‐aligned process technology for the pursuit of a better on‐state performance . As shown in Figure A, for the fin‐shaped AlGaN/GaN HEMTs with trigate structure, the fin body is wrapped around by the gate metal on the top and two sidewalls.…”
Section: Device Structure and Modelmentioning
confidence: 99%
“…In this paper, the fin length and the gate length are designed to be equal and the fin body is aligned with the gate metal based on the self-aligned process technology for the pursuit of a better on-state performance. 19,20 As shown in Figure 2A, for the fin-shaped AlGaN/GaN HEMTs with trigate structure, the fin body is wrapped around by the gate metal on the top and two sidewalls. For the fin-shaped AlGaN/GaN HEMTs with dual-gate structure, as shown in Figure 2B, the fin body is controlled by the gate metal only on the two sidewalls.…”
Section: Introductionmentioning
confidence: 99%
“…J. Ma et al achieved 1350 V high breakdown voltage NC‐HEMT by using slanted tri‐gates and the power figure of merit (FOM) reached 1.2 GW/cm. In terms of high linearity microwave devices, K. Zhang et al made NC‐HEMT with high transconductance flatness by reducing source resistance, offered an obvious improvement of 5.5 dBc in IM3 characteristics at high pin level. With the expansion of the application range of GaN based NC‐HEMT, devices will inevitably work in high temperature environment in practical applications, which will affect their performance.…”
Section: Introductionmentioning
confidence: 99%
“…Linearity is one of the most crucial figures of merit for the application of power amplifiers. For improving the device linearity, advanced device structures or epitaxial structure engineerings, such as field plate, nonlinear polarization dielectric, double-channel, and optimized barrier or cap layer thickness, have been explored [4][5][6][7]. Polarization Coulomb Field (PCF) scattering, which stems from the non-uniform distribution of the polarization charges at the AlGaN/GaN interface, is a particular scattering mechanism in AlGaN/GaN HFETs.…”
Section: Introductionmentioning
confidence: 99%