High Moisture Sensitivity of the Elements Based on Carbon Nanotubes Array

Abstract

<p align="justify"> <span><span style="font-family:Verdana;">The results of the research and development of the moisture-sensitive elements based on the carbon nanotubes (CNT) array are presented. It was shown that CNT arrays that were grown by low-temperature </span><span style="font-family:Verdana;">plasma enhanced chemical va</span></span><span style="font-family:Verdana;">por deposition (</span><span style="font-family:Verdana;">PECVD) method on the planar Si structures exhibit extremely high moisture sensitivity. The structure resistance ratio in dry and moisture conditions exceed 400. Such relatively high change in resistances is conditioned by the pattern of change of the charge carrier’s conductivity between certain nanotubes in the bundle when water mole</span><span style="font-family:Verdana;">cules adsorption occurs.</span> </p

Biomedical Strain and Humidity Sensors Based on Carbon Nanotubes

“…High moisture sensitivity occurs in the MWNT sensor when nanotubes are arranged vertically on the sub strate, that is on the flat surface of Si structure a MWNT array is grown via a buffer layer of titanium and a catalyt ic layer (FeNiCo 20 ) (Fig. 2) [21].…”