High optical damage threshold on-chip lithium tantalate microdisk resonator

Yan, Xiongshuo; Liu, Yian; Ge, Licheng; Zhu, Bing; Wu, Jiangwei; Chen, Yuping; Chen, Xianfeng

doi:10.1364/ol.394171

Cited by 24 publications

(7 citation statements)

References 42 publications

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“…However, the commercial use of LTOI in wireless applications, owing to its suitable acoustic properties, combined with the above optical properties, makes it an ideal platform for scalable manufactured electro-optical PICs, although such a use has never been demonstrated or pursued. Although free-standing ‘whispering gallery’ mode resonators have been fabricated from LiTaO 3 single crystals 26 , as a result of femtosecond laser direct writing 27 or focused ion beam milling 28 , scalable manufactured PICs have remained an outstanding challenge.…”

Section: Mainmentioning

confidence: 99%

Lithium tantalate photonic integrated circuits for volume manufacturing

Wang,

Li,

Riemensberger

et al. 2024

Nature

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Electro-optical photonic integrated circuits (PICs) based on lithium niobate (LiNbO3) have demonstrated the vast capabilities of materials with a high Pockels coefficient1,2. They enable linear and high-speed modulators operating at complementary metal–oxide–semiconductor voltage levels3 to be used in applications including data-centre communications4, high-performance computing and photonic accelerators for AI5. However, industrial use of this technology is hindered by the high cost per wafer and the limited wafer size. The high cost results from the lack of existing high-volume applications in other domains of the sort that accelerated the adoption of silicon-on-insulator (SOI) photonics, which was driven by vast investment in microelectronics. Here we report low-loss PICs made of lithium tantalate (LiTaO3), a material that has already been adopted commercially for 5G radiofrequency filters6 and therefore enables scalable manufacturing at low cost, and it has equal, and in some cases superior, properties to LiNbO3. We show that LiTaO3 can be etched to create low-loss (5.6 dB m−1) PICs using a deep ultraviolet (DUV) stepper-based manufacturing process7. We demonstrate a LiTaO3 Mach–Zehnder modulator (MZM) with a half-wave voltage–length product of 1.9 V cm and an electro-optic bandwidth of up to 40 GHz. In comparison with LiNbO3, LiTaO3 exhibits a much lower birefringence, enabling high-density circuits and broadband operation over all telecommunication bands. Moreover, the platform supports the generation of soliton microcombs. Our work paves the way for the scalable manufacture of low-cost and large-volume next-generation electro-optical PICs.

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Section: Mainmentioning

confidence: 99%

Lithium tantalate photonic integrated circuits for volume manufacturing

Wang,

Li,

Riemensberger

et al. 2024

Nature

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“…Considering a relatively large nonlinear coefficient (d 33 ≈ 26 pm∕V), LT-on-insulator (LTOI) is another fascinating alternative for on-chip photonics who possesses a higher optical damage threshold (240 MW∕cm 2 ) and a greater UV transparency (0.28 to 5.5 μm), whereas there is little research in LTOI devices and their nonlinear characterization. 241 Fifth, laser-written waveguides may receive wider applications in the field of quantum photonics. Most recently, using a singlemode waveguide and a doughnut-shaped waveguide fabricated by femtosecond laser direct writing, Chen et al 48 demonstrated the vector vortex beam emitter carrying spin and orbital angular momentum mode inside a photonic chip, allowing for highdimensional quantum information processing.…”

Section: Summary and Perspectivesmentioning

confidence: 99%

Femtosecond laser-inscribed optical waveguides in dielectric crystals: a concise review and recent advances

Kong

Chen

2022

Adv. Photon.

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“…At present, there are few studies on LTOI, and most of the researches are based on lithium tantalate bulk materials [28,29] . The LTOI features a higher laser-radiation-induced damage threshold [30] and a higher photorefractive damage threshold [31] . However, it is also notable that the second-order nonlinear coefficient d 33 of the LT is smaller than that of the LN, and in the case of uniaxial crystal, the properties of d eff can refer to Ref.…”

Section: Introductionmentioning

confidence: 99%

Untitled

2023

中国光学快报

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The compact and reliable ultraviolet (UV) source has attracted remarkable attention for its potential use in optical measurement systems, high-density optical storage, and biomedical applications. We demonstrate ultraviolet generation by frequency doubling in a lithium-tantalate-on-insulator (LTOI) microdisk via modal phase matching. The 50-μm-diameter microdisk was milled by a focused ion beam (FIB) and followed by chemo-mechanical polishing (CMP) to smooth the disk surface and edge, and the Q-factor reaches 2.74 × 10 5 in the visible band. On-chip UV coherent light with a wavelength of 384.3 nm was achieved, which shows great promise for using LTOIs in integrated ultraviolet source platforms.

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High optical damage threshold on-chip lithium tantalate microdisk resonator

Cited by 24 publications

References 42 publications

Lithium tantalate photonic integrated circuits for volume manufacturing

Lithium tantalate photonic integrated circuits for volume manufacturing

Femtosecond laser-inscribed optical waveguides in dielectric crystals: a concise review and recent advances

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