High Ozone Generation with a High-Dielectric-Constant Material

Abstract

The temporal saturation effects of the critical dimensions of nanoscale contact holes are investigated by a two-dimensional reaction-diffusion simulator for the chemical shrink techniques of nanolithography. Models included with the simulator are the crosslinking reaction of water-soluble polymers and crosslinkers, the diffusion of photoacids, and the inactivation of photoacids. Within the the statistical errors of the experimental data, the simulation critical dimensions agree with the experiment for baking temperatures over 105 C and for all baking times. It is found that the temporal saturation of the contact holes' critical dimensions can be explained by the photoacid inactivating reaction included in the simulator.

Non-Thermal Plasma Technic for Air Pollution Control

“…More recently, major fresh water and waste water treatment facilities using ozone water treatment methods have been constructed throughout the world. Additionally, new industrial applications of ozone such as wastewater treatment, exhaust gas treatment, odor elimination and semiconductor manufacturing have been studied recently [27][28][29][30][31][32][33][34][35]. However these new ozone applications demand high concentration of ozone, it was become possible for DBD to produce high concentration (100 to 300 g/m 3 ) of ozone due to the improvement of dielectric materials and electrodes cooling function, and development of ultra-short gap electrodes [27]- [35].…”