High performance and reliable silicon field emission arrays enabled by silicon nanowire current limiters

Guerrera, Stephen A.; Akinwande, Akintunde I.

doi:10.1109/iedm.2015.7409818

Cited by 7 publications

(14 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the fabrication process presented by Guerrera, a 1.1 jim thick resist is used to pattern dots with a CD of 500 nm [34]. In order to improve the CD uniformity, the amplitude of the Swing Curve must bereduced.…”

Section: Introductionmentioning

confidence: 99%

Highly uniform silicon field emitter arrays fabricated using a trilevel resist process

Karaulac

Rughoobur

Akinwande

2020

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

Highly uniform silicon field emitter arrays fabricated using a trilevel resist process

Karaulac

Rughoobur

Akinwande

2020

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

View full text Add to dashboard Cite

show abstract

“…This work discusses the development of a new cathode structure which uses Gated Field Emission Arrays (GFEAs) 5‐8 to replace the traditional thermionic cathodes. GFEAs can be modulated in time and addressed spatially using numerous devices spaced out around the device 3 .…”

Section: Introductionmentioning

confidence: 99%

A cathode support structure for use in a magnetron oscillator experiment

Black

Harper

Ward

et al. 2020

Int J Applied Ceramic Tech

View full text Add to dashboard Cite

A low temperature co‐fired ceramic (LTCC) material system has been used to develop a protype field emission cathode structure for use in an experimental magnetron oscillator. The structure is designed for used with 30 gated field emission array (GFEA) die electrically connected through silver metal traces and electrical vias. To approximate a cylinder, the cathode structure (48 mm long and 13.7 mm in diameter) is comprised of 10 faceted plates which cover the GFEA dies. Slits in the facet plates allow electron injection. The GFEA die (3 mm × 8 mm) are placed in axial columns of 3 and spaced azimuthally around a cylindrical support structure in a staggered configuration resulting in 10 azimuthal locations. LTCC manufacturing techniques were developed in order to fabricate the newly designed cathode with seven layers wrapped to form the cylinder with electrical traces and vias. Two different cathode wrapping techniques and two different via filling techniques were studied and compared. Two different facet plate manufacturing techniques were studied. Finally, four different support stand configurations for firing the cylindrical structure were also compared with a square post stand having the best circularity and linearity measurements of the fired structure.

show abstract

“…Current CFAs generally use a cylindrical format, operate with a backward or forward wave, and use a secondary emitting cathode [1], [2]. One relatively unexplored area of research is the use of gated field emission arrays (GFEAs) [3], [4] to improve current injection control. GFEAs are much more efficient electron current sources than typical thermionic cathodes [2]- [5].…”

Section: Introductionmentioning

confidence: 99%

“…al. [4], [18], [19]. The capacitance of these structures was calculated by their group to be 1-5 nf/cm 2 .…”

Section: Introductionmentioning

confidence: 99%

“…Also, an optically gated emitter circuit or optically stimulated emission could be used. Using the given cathode modulation drive signal for a simple sinusoidal resonant circuit, the estimated power consumed by the GFEAs [4], [18], [19] at 150 MHz is 0.1-1 W depending on the estimated capacitance for the array. If a square wave pulse is used, the power consumption would be substantially higher (~50 W).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Simulation of a Time-Varying Distributed Cathode in a Linear Format Crossed-Field Amplifier

Pearlman

Browning

2019

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

The effects of a temporally modulated, distributed cathode in a linear format crossed-field amplifier (CFA) are simulated in VSim and analyzed. A linear format, 150 MHz, low power (100 W), moderate gain (7 dB), meander line CFA is used as the basis for the simulation model. This paper describes simulations with different time-varying distributed cathodes in which electron injection is modulated at the RF frequency both in and out of phase with the RF input. At low RF input power the modulated electron injection dominates the operation. Injecting in phase with the RF input shows gain increases from 23 dB at 150 mA to 32 dB at 1 A for low cathode modulation power (<0.1 W). The CFA efficiency increased from 2-4% to 20-24% using the electron modulation. The simulation shows distinct cylindrically shaped electron bunches as opposed to spokes because of the synchronous injection. These results suggest that for high power magnetrons electron modulation could improve gain. Index Terms-Crossed-field amplifier (CFA), distributed beam, microwave vacuum electron devices II. SIMULATION MODEL The CFA simulated here is based on a design from Northeastern University [10], [11]. A more detailed description of the original device is given in the original work and in our previous paper [9], but a short summary is given here. The device is a linear format, injected beam, 150 MHz

show abstract

High performance and reliable silicon field emission arrays enabled by silicon nanowire current limiters

Cited by 7 publications

References 12 publications

Highly uniform silicon field emitter arrays fabricated using a trilevel resist process

Highly uniform silicon field emitter arrays fabricated using a trilevel resist process

A cathode support structure for use in a magnetron oscillator experiment

Simulation of a Time-Varying Distributed Cathode in a Linear Format Crossed-Field Amplifier

Contact Info

Product

Resources

About