2014
DOI: 10.1117/1.oe.53.9.097106
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High-performance binary blazed grating coupler used in silicon-based hybrid photodetector integration

Abstract: (2014). High-performance binary blazed grating coupler used in silicon-based hybrid photodetector integration. Optical Engineering, 53 (9), 097106-1-097106-6.High-performance binary blazed grating coupler used in silicon-based hybrid photodetector integration AbstractAn efficient and high-performance binary blazed grating coupler was designed based on silicon-on-insulator (SOI) used for silicon-based hybrid photodetector integration in an arrayed waveguide grating demodulation integrated microsystem. A relativ… Show more

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Cited by 5 publications
(4 citation statements)
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“…Resonant waveguide gratings (RWGs) 1 are structures of high interest used in a variety of applications such as filters, 2 biochemical sensors, 3 light absorbers, 4 security devices, 5 and grating couplers. 6,7 These resonances were first observed by Wood 8 in the form of anomalous diffraction phenomena in grating structures. Hessel and Oliver 9 started to differentiate anomalous diffractions in two types: the Rayleigh type, which is the classical Wood's anomaly, and the resonance type.…”
Section: Introductionmentioning
confidence: 89%
“…Resonant waveguide gratings (RWGs) 1 are structures of high interest used in a variety of applications such as filters, 2 biochemical sensors, 3 light absorbers, 4 security devices, 5 and grating couplers. 6,7 These resonances were first observed by Wood 8 in the form of anomalous diffraction phenomena in grating structures. Hessel and Oliver 9 started to differentiate anomalous diffractions in two types: the Rayleigh type, which is the classical Wood's anomaly, and the resonance type.…”
Section: Introductionmentioning
confidence: 89%
“…Particularly, in fluorescence nanoscopy, the non-uniform illumination leads to position-dependent resolution and limits the field-of-view, which is harmful in high-quality super-resolution imaging [47]. On the other hand, for photodetectors, a smaller grating coupler can provide a compact waveguide integration scheme [48,49], and a flat-top beam with uniform intensity can alleviate the space charge effect [50]. Hence, there is a need for compact and efficient couplers which can generate small flat-top beams.…”
Section: Introductionmentioning
confidence: 99%
“…The solid-state THz quantum-well photodetectors (QWPs) [5] based on low dimensional semiconductor structures have many advantages of fast response, mature manufacturing process and small volume, which are suitable for constructing THz high-speed communication and fast imaging systems. For these devices, the principle of operation that based on quantum-well sub-band transitions [6][7][8] cannot directly absorb normal incident light, so a 45°-incident coupling scheme or an integrated coupler [9] such as metal gratings [10,11], etched gratings [12,13] are commonly used to excite the localized electrons in quantum wells from the ground sub-band into the higher subbands. THz QWPs with fixed periodic grating couplers, such as one-dimensional (1D) metal gratings, two-dimensional (2D) metal gratings and dielectric gratings have been studied in previous works.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is suitable for the multi-color QWPs [14][15][16][17] or the broadband QWPs. The random grating QWPs are advanced in improving the responsivity and have an unchanged absorption line shape in comparison with 45°-facet optical coupling and normal grating optical coupling [13,[18][19][20].…”
Section: Introductionmentioning
confidence: 99%