2012
DOI: 10.1016/j.solidstatesciences.2011.11.005
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High performance distributed CPW phase shifters with etched BST thin films on Ф 3″ LaAlO3 substrates

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Cited by 8 publications
(3 citation statements)
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“…We developed CPW on this BST/sapphire film surface for measurement, which shows constant tunability of 15% at microwave frequencies from 1 to 8 GHz. Both BST/Pt/Ti/SiO 2 /Si and BST/sapphire can work as tunable elements in RF ends for achieving phase shifting or beam steering to improve wireless communication systems [16,17], depending on the requirement of different applications. To simplify the electrode patterning process, an approach of using a magnetic mask was developed to deposit the required pattern on the surface of the BST thin films, which opens possibility for low-cost and high-throughput material characterization at high microwave frequencies.…”
Section: Introduction mentioning
confidence: 99%
“…We developed CPW on this BST/sapphire film surface for measurement, which shows constant tunability of 15% at microwave frequencies from 1 to 8 GHz. Both BST/Pt/Ti/SiO 2 /Si and BST/sapphire can work as tunable elements in RF ends for achieving phase shifting or beam steering to improve wireless communication systems [16,17], depending on the requirement of different applications. To simplify the electrode patterning process, an approach of using a magnetic mask was developed to deposit the required pattern on the surface of the BST thin films, which opens possibility for low-cost and high-throughput material characterization at high microwave frequencies.…”
Section: Introduction mentioning
confidence: 99%
“…Recently, due to its important characteristics, LaAlO 3 perovskite has gained importance due to its possible application as a catalytic, electronic, optic, and luminescent material [11]. For example, LaAlO 3 has been used as a catalyst solid for the hydrogenation and hydrogenolysis of hydrocarbons [12,13], as a nano-adsorbent [14], for the oxidative degradation of organic pollutants [15], and as a substrate for different thin films [16,17], amongst other applications.…”
Section: Introductionmentioning
confidence: 99%
“…Barium strontium titanate (BST) is a promising ferroelectric material for RFC antenna due to its excellent microwave characteristics, [3] such as electric-field tunable permittivity and relatively low dielectric loss. [4] BST also shows great prospective in some tunable microwave components, such as phase shifter, [5] tunable filter, [6] varactor, [7] delay line, [8] etc. Comparing with bulk BST, the BST film possesses a superior tunability and lower relative permittivity (ε r = 300-800), [6,9] however, the preparation methods, such as pulsed laser deposition, magnetron sputtering and metalorganic chemical vapor deposition, are too expensive to be used in the microwave industry.…”
Section: Introductionmentioning
confidence: 99%