2018
DOI: 10.1109/ted.2017.2776144
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High-Performance Double-Gate $\alpha $ -InGaZnO ISFET pH Sensor Using a HfO2 Gate Dielectric

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Cited by 42 publications
(26 citation statements)
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“…ISFET typical applications are related to pH sensing. [133][134][135][136][137] When the ISFET is configured to be sensitive to ions different than H + they are also referred to as ChemFETs. 138,139 Chang and Lu developed an ISFET biosensor implemented in a 0.35-μm CMOS process for direct detection of DNA hybridization.…”
Section: Field-effect-transistor (Fet) Nanosensorsmentioning
confidence: 99%
“…ISFET typical applications are related to pH sensing. [133][134][135][136][137] When the ISFET is configured to be sensitive to ions different than H + they are also referred to as ChemFETs. 138,139 Chang and Lu developed an ISFET biosensor implemented in a 0.35-μm CMOS process for direct detection of DNA hybridization.…”
Section: Field-effect-transistor (Fet) Nanosensorsmentioning
confidence: 99%
“…Prior to being used as ENFET, the device has been biased for electrical characterization. Conventionally, for single gate operating mode, the bottom gate (BG) is grounded, whereas the top gate (TG) is grounded for double gate operation [15]. Using this methodology, TG voltage (VGS(T)), BG voltage (VGS(B)) and drain voltage (VDS) have been fixed at 0.6 V, 1.0 V and 0.3 V respectively as shown in Fig.1.…”
Section: B Characterizationmentioning
confidence: 99%
“…Dual Gate Carbon Nanotube Ion Sensitive Field Effect Transistor (DG-CNTISFET) has high-κ dielectric material HfO2 (κ ~25) as the top gate insulator and a low-κ dielectric material ZnO (κ ~1.5) as the bottom gate insulator for measuring pH value and the device analyzed for the drift rate and hysteresis [26]. The three HfO2 gate dielectric thickness on the top surface of gate is used in the Double gate amorphous indium-gallium zinc oxide Ion Sensitive Field Effect Transistor (ISFET) device for pH sensing [27]. Nano sheet gate-all-round transistor is designed using sub stack and improves the RF performance through the cut-off-frequency.…”
Section: Introductionmentioning
confidence: 99%