High Performance EGFET-Based pH Sensor Utilizing Low-Cost Industrial-Grade Touch Panel Film as the Gate Structure

Wu, Yung-Chen; Wu, Shang-Jing; Lin, Ching‐Chih

doi:10.1109/jsen.2015.2455057

Cited by 25 publications

(15 citation statements)

References 37 publications

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“…employed low‐cost touch panel film (TPF) as a sensing layer for EGFET pH sensor. [ 313 ] TPF consists of PET substrate coated with indium tin oxide, silicon dioxide, and niobium pentaoxide (ITO/SiO

_{2}

/Nb

_{2}

_{5}

). The sensitivity of the sensor realized was about 59.2 mV/pH in the pH range 3–13, with good stability, repeatability, and fast response.…”

Section: Fet‐based Microsensorsmentioning

confidence: 99%

A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

Sinha

Pal

2021

Electrochemical Science Adv

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The demand for miniaturized point‐of‐care chemical/biochemical sensors has driven the development of field‐effect transistors (FETs) based pH sensors over the last 50 years. This paper aims to review the fabrication technologies, device structures, sensing film materials, and modeling techniques utilized for FET‐based pH sensors. We present the governing principles of potentiometric sensors, with major focus on the working principles of ion‐sensitive FETs (ISFETs). We extensively review different sensing film materials deposited by various techniques, which is critical to the sensing performance of ISFETs. The popular fabrication technologies have been presented, with special emphasis on state‐of‐the‐art silicon‐on‐insulator based technology, which can achieve high sensitivity by utilizing the dual‐gate effect. Furthermore, recent advancements in nano‐ISFETs has been elucidated. We also discuss the adoption of unmodified complementary metal‐oxide semiconductor (CMOS) ISFETs using standard CMOS processes, which has enabled the fabrication of integrated ISFET arrays, which are especially suited for ion‐imaging applications. Moreover, recent developments in extended‐gate FETs has been discussed, which have gained lot of attention due to their design flexibility and ease of fabrication, which is desirable for wearable sensing applications. In addition, recently there have been efforts to utilize nonsilicon channel materials for pH‐sensing application to obtain superior performance and various channel materials have been reviewed. Finally, we have extensively reviewed the ISFET device modeling and simulation techniques using various computer‐aided design tools, which aid in sensor design and characterization.

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_{2}

/Nb

_{2}

_{5}

). The sensitivity of the sensor realized was about 59.2 mV/pH in the pH range 3–13, with good stability, repeatability, and fast response.…”

Section: Fet‐based Microsensorsmentioning

confidence: 99%

A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

Sinha

Pal

2021

Electrochemical Science Adv

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“…TPF is a multilayered material composed of ITO/SiO 2 /Nb 2 O 5 that has several advantages when used as a pH sensor, such as good sensitivity and fast response speed [ 104 ]. As already mentioned, the list of materials used as sensing membranes is very long, and the choice depends mainly on the range of interest and the required sensitivity [ 95 , 104 , 105 , 106 , 107 , 108 , 109 ]. Most of the efforts reported in the literature have been aimed at improving the performance of EGFET-based pH sensors with the use of different materials, including composites.…”

Section: Applications Of Egfet-based Sensorsmentioning

confidence: 99%

EGFET-Based Sensors for Bioanalytical Applications: A Review

Pullano

Critello

Mahbub

et al. 2018

Sensors

138

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Since the 1970s, a great deal of attention has been paid to the development of semiconductor-based biosensors because of the numerous advantages they offer, including high sensitivity, faster response time, miniaturization, and low-cost manufacturing for quick biospecific analysis with reusable features. Commercial biosensors have become highly desirable in the fields of medicine, food, and environmental monitoring as well as military applications, whereas increasing concerns about food safety and health issues have resulted in the introduction of novel legislative standards for these sensors. Numerous devices have been developed for monitoring biological processes such as nucleic acid hybridization, protein–protein interaction, antigen–antibody bonds, and substrate–enzyme reactions, just to name a few. Since the 1980s, scientific interest moved to the development of semiconductor-based devices, which also include integrated front-end electronics, such as the extended-gate field-effect transistor (EGFET) biosensor, one of the first miniaturized chemical sensors. This work is intended to be a review of the state of the art focused on the development of biosensors and chemosensors based on extended-gate field-effect transistor within the field of bioanalytical applications, which will highlight the most recent research reported in the literature. Moreover, a comparison among the diverse EGFET devices will be presented, giving particular attention to the materials and technologies.

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“…In contrast to other FET‐based sensor drivers [2–4, 14, 17–22], in this Letter, a specific kind of circuitry is used to keep the EGFETs drain–source voltage and drain current constant. In this way, the voltage of the EGFET's source terminal follows the gate terminal potential which is extended with an ITO electrode.…”

Section: Methodsmentioning

confidence: 99%

“…ITO as the ion-sensitive layer of EGFET for pH-sensing has been described by few authors [17][18][19][20][21][22] but only for short-time scale pH-sensing. In addition, a reliable encapsulated ITO electrode which can work under mechanical pressure exerted from the sensor package is missing.…”

mentioning

confidence: 99%

Indium tin oxide coated PET for differential pH‐sensing using field‐effect transistor based sensor

Mokhtarifar

Goldschmidtboeing

Woias

2018

Micro & Nano Letters

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Indium tin oxide (ITO) on polyethylene terephthalate (PET) substrate is characterised in terms of pH-sensitivity. Commercial ITO/PET sheet was cut in a shape of electrode and was connected to the gate-terminal of a metal-oxide-semiconductor field-effect transistor as the sensory part, creating an extended gate field-effect transistor (EGFET) pH-sensor. The quality of laser micromachining as well as the moulded ITO/ PET electrode is investigated. The pH-sensitivity and linearity of the sensor signal are studied over time for a single hanging ITO/PET electrode. With the help of a constant-charge amplifier circuitry, the reference electrode, dipped in the measurement cell, is grounded. Therefore, the noise level, coupled into the sensor signal from environment, is decreased and also integration of the second sensor to the measurement cell becomes possible. The pH-measurement is carried out while EGFET pair, immersed into a buffer solution next to a pseudo-reference electrode, is working in differential mode to compensate for the high drift signal rate which is common for this type of sensors. As the result, a very low-cost EGFET-based pH-sensor is achieved based on commercially available products independent of costly cleanroom processes.

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High Performance EGFET-Based pH Sensor Utilizing Low-Cost Industrial-Grade Touch Panel Film as the Gate Structure

Cited by 25 publications

References 37 publications

A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling

EGFET-Based Sensors for Bioanalytical Applications: A Review

Indium tin oxide coated PET for differential pH‐sensing using field‐effect transistor based sensor

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