2008
DOI: 10.1109/lpt.2008.2005425
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High-Performance InP-Based Photodetector in an Amplifier Layer Stack on Semi-Insulating Substrate

Abstract: Sieben -Xu, L.; Nikoufard, M.; Leijtens, X.J.M.; Vries, de, T.; Smalbrugge, E.; Nötzel, R.; Oei, Y.S.; Smit, M.K. Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested i… Show more

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Cited by 13 publications
(18 citation statements)
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“…The refractive indices of the InP cladding and InGaAsP [Q(1.25)] film layer are 3.17 and 3.3640, respectively, at the 1.55-µm wavelength. The refractive index of the Q(1.25) film layer is higher than that of the lower cladding and substrate layers [10,11]. Specifications of layers including the diameter (r), lattice constant (a), and refractive index (n) are depicted in Fig.…”
Section: Structure Of Photonic Crystalmentioning
confidence: 99%
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“…The refractive indices of the InP cladding and InGaAsP [Q(1.25)] film layer are 3.17 and 3.3640, respectively, at the 1.55-µm wavelength. The refractive index of the Q(1.25) film layer is higher than that of the lower cladding and substrate layers [10,11]. Specifications of layers including the diameter (r), lattice constant (a), and refractive index (n) are depicted in Fig.…”
Section: Structure Of Photonic Crystalmentioning
confidence: 99%
“…4). This scheme requires a butt-joint technology to fabricate the active and passive structures on a single chip [10,11]. …”
Section: Structure Of Photonic Crystalmentioning
confidence: 99%
“…The optical waveguide is formed by an absorbing nonintentionally doped InGaAsP layer with a wavelength cutoff bandgap of 1.55 µm (i-Q (1.55)) surrounded by the two i-Q (1.25) layers to decrease the barrier height, to increase the optical confinement, and their bandgap is sufficiently far from the band edge of the operating wavelength at 1.55 µm. Using bulk i-Q (1.55) instead of the multi-quantum well (MQW) materials offers the advantage of the polarization independent device [7]. The three p-doped cladding layers and the two buffer layers are from InP material with a graded doping level to reduce the optical loss and to make a low resistance path for carriers.…”
Section: Device Structurementioning
confidence: 99%
“…A highly p-doped InGaAs layer with a thickness of 300 nm on top of the p-InP cladding layers is employed to form a lowresistance ohmic p-contact [13]. To achieve higher radio frequency (RF) bandwidth, a semi-insulating (SI) substrate is used to reduce the RF attenuation and the parasitic capacitance of the RF-probe and provides a good electric isolation of the components [7]. The polyimide is used to support a broader signal electrode respect to the ridge.…”
Section: Device Structurementioning
confidence: 99%
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