High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

Qiang, Tian; Wang, Cong; Liu, Mingqing; Adhikari, Kishor Kumar; Liang, Jun-Ge; Wang, Lei; Li, Yang; Wu, Yuming; Yang, Guohui; Meng, Fan‐Yi; Fu, Jiahui; Wu, Qun; Kim, Nam‐Young; Yao, Zhao

doi:10.1016/j.snb.2017.11.060

Cited by 67 publications

(31 citation statements)

References 22 publications

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“…With time, the concept of Microelectromechanical Systems (MEMS) has developed in a much easier manner to create a miniaturised version of the sensing prototypes using the microfabrication technique. The usage of MEMS-based sensors has, with time, broadened to a wide range of applications [4,5,6], including different kinds of alloys and pure material [7,8,9]. Among the different kinds of MEMS-based sensors, silicon sensors have always been crucial [10,11] for quick and efficient sensing purposes.…”

Section: Introductionmentioning

confidence: 99%

Silicon-Based Sensors for Biomedical Applications: A Review

Kundu

et al. 2019

Sensors

111

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The paper highlights some of the significant works done in the field of medical and biomedical sensing using silicon-based technology. The use of silicon sensors is one of the pivotal and prolonged techniques employed in a range of healthcare, industrial and environmental applications by virtue of its distinct advantages over other counterparts in Microelectromechanical systems (MEMS) technology. Among them, the sensors for biomedical applications are one of the most significant ones, which not only assist in improving the quality of human life but also help in the field of microfabrication by imparting knowledge about how to develop enhanced multifunctional sensing prototypes. The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. The electrical conductivity and the mechanical flexibility of silicon vary to a large extent depending on its use in developing prototypes. The article also explains some of the bottlenecks that need to be dealt with in the current scenario, along with some possible remedies. Finally, a brief market survey is given to estimate a probable increase in the usage of silicon in developing a variety of biomedical prototypes in the upcoming years.

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Section: Introductionmentioning

confidence: 99%

Silicon-Based Sensors for Biomedical Applications: A Review

Kundu

et al. 2019

Sensors

111

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“…UE to their high sensitivity, low power consumption, and fabrication costs, humidity sensors play an important role in many measurement and control applications, including meteorology, agriculture, industrial control, and medical instrumentation [1][2][3][4]. In the past years, a lot of effort has been made to develop high performance humidity sensors [5][6][7][8], exhibiting large sensitivity, fast response and recovery [9][10], and small humidity hysteresis. Various transduction techniques, such as capacitive, resistive, acoustic, optical and mechanical, have been adopted for the design of humidity sensors.…”

Section: Introductionmentioning

confidence: 99%

Performance Analysis of Flexible Ink-Jet Printed Humidity Sensors Based on Graphene Oxide

et al. 2018

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This paper presents design, fabrication and characterization of flexible capacitive graphene oxide (GO) based humidity sensors, which can be used in many applications, such as environmental protection, civil engineering, and agriculture. They consist of interdigitated electrodes ink-jet printed on a polyimide flexible substrate and GO based sensing layer. Measurement setup for testing and characterization was developed in laboratory conditions. The dependence of the capacitance and resistance of the GO based humidity sensors on the percentage of the applied humidity is presented. The main advantage of developed GO based capacitive humidity sensors is very large variation of capacitance, almost five orders of magnitude, compared to the previously demonstrated sensors. The other advantages of the sensors are fast response-recovery time, excellent reproducibility of the measurement results and use of cost-effective additive ink-jet technology.

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“…Most of the absolute errors were below 0.1 MΩ at different calibration points, and the linearity was about 5.3%. It can be noted that compared with the resistive humidity sensor based on multi-walled carbon nanotubes 21 and the disulfide/graphene oxide flexible humidity sensor 22 reported by the predecessors, the flexible humidity sensor in this paper has smaller nonlinear errors.…”

Section: Results and Discussionmentioning

confidence: 72%

Hysteresis Dynamic Modeling and Analysis of Flexible Nano Silver–Polyvinyl Alcohol Humidity Sensor Based on the Microscopic Process and Langmuir–Fick Theory

Xia

Wang

et al. 2022

ACS Omega

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In recent years, advances in materials science and manufacturing technologies have facilitated the development of flexible sensors. However, there are still performance gaps between emerging flexible sensors and traditional silicon-based rigid sensors, especially lacking dynamic modeling and optimization analysis for addressing above challenges. This paper describes a hysteresis dynamic modeling method for flexible humidity sensors. Through inkjet printing and coating methods, the polyvinyl alcohol (PVA) sensitive layer and nano silver interdigital electrode are fabricated on flexible polyethylene naphthalate substrates. The performance characterization results show that the sensitivity and maximum hysteresis within the range of 12–98% relative humidity (RH) are −0.02167 MΩ/% RH and 2.7% RH, respectively. The sensor also has outstanding dynamic response ability and stability in a wide range of humidity variation. The hysteresis mechanism of flexible humidity sensors is theoretically analyzed from microscopic hysteresis processes, Langmuir monomolecular adsorption dynamic modeling, and Fick diffusion dynamic modeling. These hysteresis models provide a path for the hysteresis optimization of flexible PVA humidity sensors. Further exploration of the diffusion rate of water molecules and the proportion of PVA in ink represents promising hysteresis optimization directions of flexible humidity sensors based on PVA-sensitive material.

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High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

Cited by 67 publications

References 22 publications

Silicon-Based Sensors for Biomedical Applications: A Review

Silicon-Based Sensors for Biomedical Applications: A Review

Performance Analysis of Flexible Ink-Jet Printed Humidity Sensors Based on Graphene Oxide

Hysteresis Dynamic Modeling and Analysis of Flexible Nano Silver–Polyvinyl Alcohol Humidity Sensor Based on the Microscopic Process and Langmuir–Fick Theory

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