High performance SOI microring resonator for biochemical sensing

Ciminelli, Caterina; Dell’Olio, Francesco; Conteduca, Donato; Campanella, Carlo Edoardo; Armenise, Mario Nicola

doi:10.1016/j.optlastec.2013.12.011

Cited by 97 publications

(60 citation statements)

References 26 publications

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“…In this condition, the increase of the refractive index of deionized water due to the presence of solubilized glucose was 0.012, according to Ciminelli et al 25 . Such a refractive index variation provided a resonant wavelength red-shift of 1.39 nm at around 1558 nm ( figure 11.a).…”

Section: Sensing Experimentsmentioning

confidence: 80%

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Integrated polymer micro-ring resonators for optical sensing applications

Girault

Lorrain

Poffo

et al. 2015

Journal of Applied Physics

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Micro-resonators (MR) have become a key element for integrated optical sensors due to their integration capability and their easy fabrication with low cost polymer materials.Nowadays, there is a growing need on MRs as highly sensitive and selective functions especially in the areas of food and health. The context of this work is to implement and study integrated micro-ring resonators devoted to sensing applications. They are fabricated by processing SU8 polymer as core layer and PMATRIFE polymer as lower cladding layer. The refractive index of the polymers and of the waveguide structure as a function of the wavelength are presented. Using these results, a theoretical study of the coupling between ring and straight waveguides has been undertaken in order to define the MR design. Sub-micronic gaps of 0.5 µm to 1 µm between the ring and the straight waveguides have been successfully achieved with UV (i-lines) photolithography. Different superstrates such as air, water and aqueous solutions with glucose at different concentrations have been studied. First results show a good normalized transmission contrast of 0.98, a resonator quality factor around 1.5x10 4 corresponding to a coupling ratio of 14.7 % and ring propagation losses around 5 dB/cm.Preliminary sensing experiments have been performed for different concentrations of glucose; a sensitivity of 115 ± 8 nm/RIU at 1550 nm has been obtained with this couple of polymers.

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Section: Sensing Experimentsmentioning

confidence: 80%

“…MR 25 and higher sensitivity (300 nm/RIU) 6 was obtained with silicon slot-waveguides-based ring resonator on insulator. …”

Section: Sensing Experimentsmentioning

confidence: 96%

Integrated polymer micro-ring resonators for optical sensing applications

Girault

Lorrain

Poffo

et al. 2015

Journal of Applied Physics

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“…Without the loss of generality, we apply our structure to the detection of glucose and ethanol sensing as an example. The refractive indexes of the glucose ( glucose n ) and ethanol (n ethanol ) can be calculated from the concentration (C%) based on the experimental results at wavelength 1550 nm as [24,25] Fig. 4.…”

Section: Resultsmentioning

confidence: 99%

Two-channel highly sensitive sensors based on 4 × 4 multimode interference couplers

Thanh

2017

Photonic Sens

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Abstract:We propose a new kind of microring resonators (MRR) based on 4 × 4 multimode interference (MMI) couplers for multichannel and highly sensitive chemical and biological sensors. The proposed sensor structure has advantages of compactness and high sensitivity compared with the reported sensing structures. By using the transfer matrix method (TMM) and numerical simulations, the designs of the sensor based on silicon waveguides are optimized and demonstrated in detail. We apply our structure to detect glucose and ethanol concentrations simultaneously. A high sensitivity of 9000 nm/RIU, detection limit of 2 × 10 -4 for glucose sensing and sensitivity of 6000 nm/RIU, detection limit of 1.3 × 10 -5 for ethanol sensing are achieved.

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“…Such cavity resonators are routinely fabricated, via deep UV or e-beam lithography with sub-μm precision, from the commercial silicon-on-insulator (SOI) platform with a wire-ring, positioned adjacent to a straight section wire-waveguide, providing a low loss resonant cavity into which light is evanescently coupled when the wavelength matches an integer number of round-trips of the ring [6]. The efficiency with which this coupling is achieved, and the very narrow (sub-nm) cavity resonances, provides a tightly confined (both physically and spectrally) intense evanescent field for near-surface molecular interaction, and therefore sensing [7][8][9]. The transmission spectrum (of a tuneable laser or broadband source) at the wire-guide output reveals these cavity resonances, the spectral position of which is also a strong function of the local (near surface) refractive index, which depends on the concentration of the bound target molecule.…”

Section: Introductionmentioning

confidence: 99%

“…By monitoring this transmitted light intensity it is therefore possible to detect extremely small changes in the refractive index of the near surface region as molecules attach themselves to the primed silicon cavity surface. The functionalization of such silicon microcavities for bio-sensing applications has now been reasonably well explored, for instance for the detection of single-stranded DNA by peptide nucleic acid functionalization [7], streptavidin detection by biotin functionalization [8] and glucose detection by glucose oxidase functionalization [9]. However, the chemical functionalisation of silicon is limited in its scope due to its relatively poor reactivity, so that even the versatile 'click-chemistry' route to biofunctionalization [10] is not possible directly on silicon.…”

Section: Introductionmentioning

confidence: 99%

Determination of the quasi-TE mode (in-plane) graphene linear absorption coefficient via integration with silicon-on-insulator racetrack cavity resonators

Crowe¹,

Clark²,

Hussein³

et al. 2014

Opt. Express

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Abstract:We examine the near-IR light-matter interaction for graphene integrated cavity ring resonators based on silicon-on-insulator (SOI) racetrack waveguides. Fitting of the cavity resonances from quasi-TE mode transmission spectra reveal the real part of the effective refractive index for graphene, n eff = 2.23 ± 0.02 and linear absorption coefficient, α gTE = 0.11 ± 0.01dBμm −1 . The evanescent nature of the guided mode coupling to graphene at resonance depends strongly on the height of the graphene above the cavity, which places limits on the cavity length for optical sensing applications. ©2014 Optical Society of America

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High performance SOI microring resonator for biochemical sensing

Cited by 97 publications

References 26 publications

Integrated polymer micro-ring resonators for optical sensing applications

Integrated polymer micro-ring resonators for optical sensing applications

Two-channel highly sensitive sensors based on 4 × 4 multimode interference couplers

Determination of the quasi-TE mode (in-plane) graphene linear absorption coefficient via integration with silicon-on-insulator racetrack cavity resonators

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