High-performance thin-film optical filters with stress compensation

Bégou, Thomas; Lemarchand, Fabien; Lemarquis, Frédéric; Moreau, Antonin; Lumeau, Julien

doi:10.1364/josaa.36.00c113

Cited by 14 publications

(7 citation statements)

References 20 publications

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“…Layer thicknesses are controlled in real time during the deposition process with an in situ optical monitoring system (Buḧler OMS 5000). 61 Refractive indices were determined from transmission measurement on single layer using reverse engineering techniques. 62 Figure 6(a,b) show SEM images of a resulting structure.…”

Section: ■ Conclusionmentioning

confidence: 99%

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

et al. 2023

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We propose a novel implementation of a miniaturized photonic platform fabricated on a multicore fiber tip, capable of tunable optical functions via coupling to Bloch surface waves (BSWs). A one-dimensional photonic crystal is deposited on the cleaved surface of a fiber tip, allowing the propagation of BSWs in the near-infrared. On top of each core, subwavelength gratings are fabricated to operate as optical couplers between BSWs and the corresponding fiber modes. The ability to control the optical interconnection among different pairs of cores of the multicore fiber via polarization-selective BSW coupling is demonstrated. The resulting compact, tunable, and portable platforms can be fruitfully employed in the vast application domain covered by optical fiber technology including sensing, optical trapping, manipulation, and information processing.

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Section: ■ Conclusionmentioning

confidence: 99%

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

et al. 2023

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“…Coatings 2023, 13, x FOR PEER REVIEW 10 of 14 related work, Begou et al [28] successfully deposited bandpass filters with two wavelength ranges on double-sided glass. After accounting for the deformation of the thin film and the substrate due to the residual stress induced by the deposition of the multilayer film on one side, the filter was passed through.…”

Section: Residual Stress Measurement In Thin Filmsmentioning

confidence: 99%

Optical Interference Filters Combined with Thin Film Residual Stress Compensation for Image Contrast Enhancement

Tien

Cheng

et al. 2023

Coatings

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We propose two single-wavelength notch filters and one dual-wavelength (480 and 620 nm) notch filter to enhance image contrast. The stack structure of the notch filters was designed as (Ta2O5/SiO2)4Ta2O5 in Essential Macleod thin film simulation software. Dual-electron-beam evaporation with ion beam-assisted deposition was used to prepare optical interference filters with different center wavelengths. A multilayer notch filter with a center wavelength of 620 nm was deposited on the front surface of the glass, and then a notch filter with a center wavelength of 480 nm was coated on the rear surface of the same glass. The proposed dual-wavelength (480 and 620 nm) notch filter is a combination of two single-wavelength notch filters coated on a double-sided glass substrate to compensate for residual stress. The transmittance, residual stress, and surface roughness of the proposed notch filter were evaluated using different measuring instruments. The experimental results show that the residual stress of the dual-wavelength notch filter could be reduced to 10.8 MPa by using a double-sided coating technique. The root-mean-square (RMS) surface roughness of the notch filters was measured by using a Linnik microscopic interferometer. The RMS surface roughness was 1.80 for the 620 nm notch filter and 2.09 for the 480 nm notch filter. The image contrast obtained with the three different notch filters was measured using an optical microscope and a CMOS camera. The contrast value could be increased from 0.328 (without a filter) to 0.696 (dual-wavelength notch filter).

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“…The second stresscompensation method, where the mechanical stress of the single layers was incorporated into the design of the optical coating of a single side antireflection (AR), showed a 49% reduction of the total stress compared to the AR coating without incorporation of stress into the design. The strategy of depositing interference coatings on both sides of the substrate to compensate stress has also been demonstrated by Begou et al 75,76 and Trubetskov et al 77 Liu et al fabricated stresscompensated AR coatings using contrary stress of Al 2 O 3 deposited using ALD (having tensile stress) and SiO 2 deposited using ion beam sputtering (IBS) (having compressive stress). 78 The stress of −38 MPa (d = 628 nm) was obtained for the AR coating compared to the single-layer ALD Al 2 O 3 (302 and 343 MPa, for d = 148 and 178 nm, respectively) and IBS SiO 2 (−450 and −315 MPa, for d = 182 and 135 nm, respectively).…”

Section: ■ Introductionmentioning

confidence: 95%

Plasma-Enhanced Atomic Layer Deposition of HfO₂ with Substrate Biasing: Thin Films for High-Reflective Mirrors

Beladiya

Faraz

Schmitt

et al. 2022

ACS Appl. Mater. Interfaces

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High-performance thin-film optical filters with stress compensation

Cited by 14 publications

References 20 publications

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

Optical Interference Filters Combined with Thin Film Residual Stress Compensation for Image Contrast Enhancement

Plasma-Enhanced Atomic Layer Deposition of HfO₂ with Substrate Biasing: Thin Films for High-Reflective Mirrors

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High-performance thin-film optical filters with stress compensation

Cited by 14 publications

References 20 publications

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

Miniaturized Bloch Surface Wave Platform on a Multicore Fiber

Optical Interference Filters Combined with Thin Film Residual Stress Compensation for Image Contrast Enhancement

Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors

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Plasma-Enhanced Atomic Layer Deposition of HfO₂ with Substrate Biasing: Thin Films for High-Reflective Mirrors