High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17μm pixel-pitch

Trouilleau, C.; Fièque, B.; Noblet, S.; Giner, F.; Pochic, D.; Durand, A.; Robert, P.; Cortial, S.; Vilain, M.; Tissot, Jean-Luc; Yon, J. J.

doi:10.1117/12.819993

Cited by 23 publications

(19 citation statements)

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“…Following the development of the first amorphous silicon XGA arrays with 17-μm pixel pitch with high uniform performance, 11 we have shown that it can be translated into a high-performance (45-mK) VGA format sensor well adapted to more compact systems along with a low thermal time constant (9 ms) enabling 60-Hz frame-rate operation with limited smearing effect. The device shows a very low power consumption (150 mW), which allows longer operational time of portable cameras or systems.…”

Section: Resultsmentioning

confidence: 99%

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High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-<italic>μ</italic>m pixel pitch

Tissot

2011

Opt. Eng

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Downloaded From: http://opticalengineering.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms Optical Engineering 50(6), 061006 (June 2011)High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-μm pixel pitch Abstract. The high level of accumulated expertise by ULIS and CEA/LETI on uncooled microbolometers made from amorphous silicon with 45, 35, and 25 μm enables ULIS to develop video graphics array (VGA) and extended graphics array (XGA) infrared focal plane array (IRFPA) formats with 17-μm pixel pitch to fulfill every application. These detectors keep all the recent innovations developed on the 25-μm pixel-pitch read out integrated circuit (ROIC) (detector configuration by serial link, low power consumption, and wide electrical dynamic range). The specific appeal of these units lies in the high spatial resolution it provides while keeping the small thermal time constant. The reduction of the pixel pitch turns the VGA array into a product well adapted for high-resolution and compact systems and the XGA a product well adapted for high-resolution imaging systems. High electro-optical performances have been demonstrated with noise equivalent temperature difference (NETD) < 50 mK. We insist on NETD and wide thermal dynamic range trade-off, and on the high characteristics uniformity achieved thanks to the mastering of the amorphous silicon technology as well as the ROIC design. This technology node paves the way to high-end products as well as low-end, compact, smaller formats, such as 320 × 240 and 160 × 120 or smaller. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Section: Resultsmentioning

confidence: 99%

“…First of all, the dc level is to stay as constant as possible all over the temperature range. 11 Most of all, the dc level shall not reach any point of saturation of the circuit (Fig. 9).…”

Section: Tec-less Capabilitiesmentioning

confidence: 98%

High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-<italic>μ</italic>m pixel pitch

Tissot

2011

Opt. Eng

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“…Worldwide effort is still continuing to develop high-performance microbolometer FPAs with larger formats, smaller pixel pitches, and improved sensitivities [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

MT3825BA: a 384×288-25µm ROIC for uncooled microbolometer FPAs

Eminoglu¹,

Gulden²,

Bayhan³

et al. 2014

SPIE Proceedings

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This paper reports the development of a new microbolometer Readout Integrated Circuit (ROIC) called MT3825BA. It has a format of 384 × 288 and a pixel pitch of 25µm. MT3825BA is Mikro-Tasarim's second microbolometer ROIC product, which is developed specifically for resistive surface micro-machined microbolometer detector arrays using high-TCR pixel materials, such as VO x and a-Si. MT3825BA has a system-on-chip architecture, where all the timing, biasing, and pixel non-uniformity correction (NUC) operations in the ROIC are applied using on-chip circuitry simplifying the use and system integration of this ROIC. The ROIC is designed to support pixel resistance values ranging from 30 KΩ to 100 KΩ. MT3825BA is operated using conventional row based readout method, where pixels in the array are read out in a row-by-row basis, where the applied bias for each pixel in a given row is updated at the beginning of each line period according to the applied line based NUC data. The NUC data is applied continuously in a row-by-row basis using the serial programming interface, which is also used to program user configurable features of the ROIC, such as readout gain, integration time, and number of analog video outputs. MT3825BA has a total of 4 analog video outputs and 2 analog reference outputs, placed at the top and bottom of the ROIC, which can be programmed to operate in the 1, 2, and 4-output modes, supporting frames rates well above 60 fps at a 3 MHz pixel output rate. The pixels in the array are read out with respect to reference pixels implemented above and below actual array pixels. The bias voltage of the pixels can be programmed over a 1.0 V range to compensate for the changes in the detector resistance values due to the variations coming from the manufacturing process or changes in the operating temperature. The ROIC has an on-chip integrated temperature sensor with a sensitivity of better than 5 mV / K, and the output of the temperature sensor can be read out the output as part of the analog video stream. MT3825BA can be used to build a microbolometer FPAs with an NETD value below 100 mK using a microbolometer detector array fabrication technology with a detector resistance value up to 100 KΩ, a high TCR value (> 2 % / K), and a sufficiently low pixel thermal conductance (G th ≤ 20 nW / K). MT3825BA measures 13.0 mm × 13.5 mm and is fabricated on 200 mm CMOS wafers. The microbolometer ROIC wafers are engineered to have flat surface finish to simplify the wafer level detector fabrication and wafer level vacuum packaging (WLVP). The ROIC runs on 3.3 V analog and 1.8 V digital supplies, and dissipates less than 85 mW in the 2-output mode at 30 fps. Mikro-Tasarim provides tested ROIC wafers and offers compact test electronics and software for its ROIC customers to shorten their FPA and camera development cycles.

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“…Worldwide effort is still continuing to fabricate uncooled microbolometer FPAs with larger formats, smaller pixel pitches, and improved sensitivities [7][8][9][10]. Fabrication of microbolometer FPAs requires MEMS based wafer level processing on top of CMOS ROIC wafers.…”

Section: Introductionmentioning

confidence: 99%

A 640×480-17μm ROIC for uncooled microbolometer FPAs

Eminoglu¹,

Gulden²,

Bayhan³

et al. 2015

SPIE Proceedings

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This paper reports the development of a new microbolometer Readout Integrated Circuit (ROIC), called MT6417BA. It has a format of 640 × 480 (VGA) and a pixel pitch of 17µm. MT6417BA is Mikro-Tasarim's third microbolometer ROIC, which is developed specifically for surface micro-machined microbolometer detector arrays using high-TCR pixel materials, such as VOx and a-Si. MT6417BA has a system-on-chip architecture, where all the timing, biasing, and pixel non-uniformity-correction (NUC) operations in the ROIC are applied using on-chip circuitry simplifying the use and system integration of this ROIC. MT6417BA has a serial programming interface that can be used to configure the programmable ROIC features and to load the NUC date to the ROIC. MT6417BA has a total of 4 analog video outputs and 2 analog reference outputs, placed at the top and bottom of the ROIC, which can be programmed to operate in the 1, 2, and 4-output modes and can support frames rates above 60 fps at 10 MHz pixel output rate. The ROIC is designed to support pixel resistance values ranging up to 100kΩ. MT6417BA is operated using conventional row based readout method, where pixels in the array are readout in a row-by-row basis, where they are biased and integrated using synchronously applied NUC data. The NUC data is applied continuously in a row-by-row basis using the serial programming interface operated at 20 MHz supporting frame rates as high as 60 fps. The bias voltage of the pixels can be programmed over a 1.0 V range to compensate for the changes in the detector resistance values due to the variations coming from the manufacturing process. The ROIC has an on-chip integrated temperature sensor with a sensitivity of better than 5 mV / K, and the output of the temperature sensor is embedded in the analog video stream. MT6417BA can be used to build a microbolometer FPAs with an NETD value below 50 mK using a microbolometer detector array fabrication technology with a nominal detector resistance of 60 KΩ, a high TCR value (> 3 % / K), and a sufficiently low pixel thermal conductance (Gth ≤ 10 nW / K). MT6417BA ROIC die measures 14.1 mm × 15.4 mm in a 180 nm CMOS. MT6417BA is fabricated on 200 mm diameter CMOS wafers with 100 parts per wafer. The microbolometer ROIC wafers are engineered to have flat surface finish to simplify the wafer level detector fabrication and wafer-level vacuum packaging (WLVP). The ROIC runs on 3.3 V analog and 1.8 V digital supplies, and dissipates less than 150 mW in the 2-output mode at 60 fps. Mikro-Tasarim provides tested ROIC wafers and offers compact test electronics and software for its ROIC customers to shorten their uncooled FPA and camera development cycles. Mikro-Tasarim has also recently developed a new programmable mixed-signal application specific integrated circuit (ASIC), called MTAS1410X4, which is designed to perform ROIC driving and digitization functions for microbolometer ROICs with analog outputs, such as MT6417BA and MT3825BA ROIC products of Mikro-Tasarim. MTAS1410X4 has 4 simultaneously working 14...

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High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17μm pixel-pitch

Cited by 23 publications

References 0 publications

High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-<italic>μ</italic>m pixel pitch

High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-<italic>μ</italic>m pixel pitch

MT3825BA: a 384×288-25µm ROIC for uncooled microbolometer FPAs

A 640×480-17μm ROIC for uncooled microbolometer FPAs

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