High-Performance Waveguide-Integrated Bi₂O₂Se Photodetector for Si Photonic Integrated Circuits

Abstract

Due to the excellent electrical and optical properties and their integration capability without lattice matching requirements, low-dimensional materials have received increasing attention in silicon photonic circuits. Bi2O2Se with high carrier mobility, narrow bandgap, and good air stability is very promising for high-performance near-infrared photodetectors. Here, the chemical vapor deposition method is applied to grow Bi2O2Se onto mica, and our developed polycarbonate/polydimethylsiloxane-assisted transfer method enables the clean and intact transfer of Bi2O2Se on top of a silicon waveguide. We demonstrated the Bi2O2Se/Si waveguide integrated photodetector with a small dark current of 72.9 nA, high responsivity of 3.5 A·W–1, fast rise/decay times of 22/78 ns, and low noise-equivalent power of 15.1 pW·Hz–0.5 at an applied voltage of 2 V in the O-band for transverse electric modes. Additionally, a microring resonator is designed for enhancing light–matter interaction, resulting in a wavelength-sensitive photodetector with reduced dark current (15.3 nA at 2 V) and more than a 3-fold enhancement in responsivity at the resonance wavelength, which is suitable for spectrally resolved applications. These results promote the integration of Bi2O2Se with a silicon photonic platform and are expected to accelerate the future use of integrated photodetectors in spectroscopy, sensing, and communication applications.

Momentum-matching and band-alignment van der Waals heterostructures for high-efficiency infrared photodetection

“…Several strategies have been demonstrated effective to enhancing the QE in 2D photodetectors, such as optical waveguides, optical resonators, surface plasmons, etc. The optical waveguides can extend the light-matter interaction length to the in-plane dimension of 2D channel rather than the outof-plane dimension, leading to improved light absorptivity but at the expense of device footprint because of the light-coupling pads and waveguides (14)(15)(16)(17). Optical resonators can resonantly enhance the light absorptivity, but only within the specific and narrow resonance waveband along with complicated fabrication processes (18,19).…”

Silicon Thermo-Optic Switches with Graphene Heaters Operating at Mid-Infrared Waveband

“…Two-dimensional materials [ 41 , 42 ] own remarkable optical and electrical properties and can be alternative heating materials for TO switch, which are favorable for photonic integrated circuits at MIR waveband [ 43 ]. Graphene is an exceptional heater candidate that offers extraordinary physical properties [ 44 , 45 , 46 ], including ultra-wide working waveband from visible light to microwave [ 47 ] and high thermal conductivity [ 48 ].…”

Quantitative Understanding of the Photoluminescence Modulation and Doping of Monolayer WS2 by Heterostructuring with Non-van der Waals 2D Bi2O2Se Quantum Dots

“…One such material is 2D Bi 2 O 2 Se, in which individual layers are bound by weak electrostatic force . Although there have been recent reports on the various outstanding properties of 2D Bi 2 O 2 Se and applications, − the optical properties of Bi 2 O 2 Se QDs mostly remain unexplored, to the best of our knowledge. Additionally, there have been no reports on the influence of these Bi 2 O 2 Se QDs on the PL emission properties of 1L-WS 2 .…”