High power piezoelectric characteristics of KNbO&lt;inf&gt;3&lt;/inf&gt; thick films by hydrothermal method

Ishikawa, Mutsuo; Uchida, Yasufumi; Kosuge, Nobuaki; Funakubo, Hiroshi; Kurosawa, Minoru Kuribayashi

doi:10.1109/ultsym.2015.0369

Cited by 1 publication

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“…27,34,[41][42][43] Herein, it is reported that a maximum vibration velocity of 1 m s −1 was sometimes a limitation for piezoelectric bulk ceramics because of the inner stress generated by the sintering and polling treatment. 44) These results suggest that hydrothermally synthesized KNN films, which have a self-polarized state without a sintering process, are good candidates for high-power applications.…”

Section: Film Thickness Dependence Of As-deposited Filmsmentioning

confidence: 89%

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film

Tateyama¹,

Ito²,

Shiraishi³

et al. 2022

Jpn. J. Appl. Phys.

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Two types of vibrators using hydrothermally synthesized ferroelectric (K, Na)NbO3 films were fabricated on SrTiO3 substrates. Cantilever piezoelectric vibrators with film thicknesses of 3.5- 22.3 µm were used under low-frequency and no resonance drive. The obtained output displacement increased almost linearly as the film thickness increased under both unipolar and bipolar drives. The obtained transverse piezoelectric coefficient, e 31,f , was almost independent of film thickness, ≈−5 C/m2. On the other hand, a longitudinal piezoelectric vibrator was used under the resonance of half-length longitudinal vibration. The electromechanical coupling factor, K 2, and the mechanical quality factor, Q m, were evaluated. K2 and Q m respectively increased from 0.14% to 1.23% and decreased from 556 to 224 as the film thickness increased from 2.5 to 26 μm. By applying a large voltage of 50 V0-p, a large vibration velocity of 1.5 m/s was obtained for the vibrator with a film thickness of 26 μm.

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Section: Film Thickness Dependence Of As-deposited Filmsmentioning

confidence: 89%

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film

Tateyama¹,

Ito²,

Shiraishi³

et al. 2022

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

High power piezoelectric characteristics of KNbO<inf>3</inf> thick films by hydrothermal method

Cited by 1 publication

References 3 publications

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film

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High power piezoelectric characteristics of KNbO<inf>3</inf> thick films by hydrothermal method

Cited by 1 publication

References 3 publications

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K0.88Na0.12)NbO3 film

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K0.88Na0.12)NbO3 film

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Product

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Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film

Effect of film thickness on piezoelectric vibrator using hydrothermally synthesized epitaxial (K_0.88Na_0.12)NbO₃ film