High power SP4T MEMS switch for space applications

Layered axial force coupled membrane based metal contact single-pole quad-throw RF MEMS switch: design, RF performance and mechanical modeling

“…2. The membranes on the same side are coupled in pairs (Farinelli et al 2012;Singh and Rangra 2015). Hence to conduct the signal between input port 1 and any one of the output port 2-5, the metal-contact switch in the respective port can be turned ON (actuated) to route the signal from input to that actuated output port, and this will automatically turn the switch coupled to it to OFF state due to axial force.…”

“…Various approaches like the use of active recovery mechanisms, push-pull mechanism (Cabral and Holmes 2006;Farinelli et al 2012;Robin et al 2008) or the use of seesaw type structures (Cabral and Holmes 2006;Singh 2015) have been proposed by many researchers, in which an additional electrode is used to overcome the lack of restoring Abstract RF MEMS is a perfect candidate to replace the conventional switches used for microwave frequency. Most of the RF MEMS switches developed generally concentrate on single-pole single-throw based configurations and limited work is reported on switches based on single-pole multiple-throw.…”

A 0–10GHz SP16T MEMS switch for switched beam satellite antenna systems

“…With respect to the devices presented in [7], the new SP4Ts dies are provided with 0-level package. It is based on a Quartz cap polymeric sealing ring.…”