High Precision Fabrication Method of Diffractive Lens on Large Aperture Quartz Substrate

Chang-chang, 巩畅畅 Gong; Bin, 范斌 Fan; Jun-ming, 邵俊铭 Shao; Liu, Xin

doi:10.3788/gzxb20204905.0522001

Cited by 1 publication

(1 citation statement)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nevertheless, higher alignment and manufacturing precision of the masking layer can further improve figuring accuracy, such as choosing an inkjet printer with higher positioning accuracy and finer line widths, using laser radiography to manufacture the masking layers, or optimizing the alignment methods. In addition, in our earlier experiments, the etching non-uniformity measured by this experimental apparatus was less than ±6% [ 32 ], which has the potential to be further improved. Therefore, for higher precision plasma processing, the influence of the etching non-uniformity cannot be ignored to some extent.…”

Section: Resultsmentioning

confidence: 99%

Plasma Figure Correction Method Based on Multiple Distributed Material Removal Functions

et al. 2023

View full text Add to dashboard Cite

In the process of plasma figure correction for a quartz sub-mirror, the plasma parallel removal process and ink masking layer are combined for the first time. A universal plasma figure correction method based on multiple distributed material removal functions is demonstrated, and its technological characteristics are analyzed. Through this method, the processing time is independent of the workpiece aperture, which saves time for the material removal function to scan along the trajectory. After seven iterations, the form error of the quartz element is converged from the initial figure error of ~114 nm RMS to a figure error of ~28 nm RMS, which shows the practical potential of the plasma figure correction method based on multiple distributed material removal functions in optical element manufacturing and the possibility of becoming a new stage process in the optical manufacturing chain.

show abstract

Section: Resultsmentioning

confidence: 99%