High-precision magnetic levitation stage for photolithography

Kim, Won-jong; Trumper, David L.

doi:10.1016/s0141-6359(98)00009-9

Cited by 244 publications

(101 citation statements)

References 4 publications

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“…1 Planar motors have been studied in several research groups to meet the high-speed, precise, compact and lightweight needs for the multi-DOF motion stage. [2][3][4][5][6][7][8][9] Although there are several types such as moving coil type 4 and reluctant motor, 10 planar motors with moving magnet matrix were mostly studied.…”

Section: Introductionmentioning

confidence: 99%

2D hall sensor array for measuring the position of a magnet matrix

Ahn

Kim

2014

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Hall sensor array is used to measure the position of a magnet array and needs compensation of errors caused by manufacturing tolerances as well as harmonic components of the magnetic flux of the magnet array. This paper presents a 2D hall sensor array to measure the position of a magnet matrix by filtering harmonic components. First, 1D sensor array to filter out arbitrary number of harmonic signals is proposed and extended to 2D sensor array for the position measurement of a magnet matrix. A 2D hall sensor array for filtering both fundamental and 2 nd harmonic components of the magnetic flux and its conditioning circuit board are built to measure the position of the magnet matrix for a planar motor. Finally, performances of filtering harmonics and measuring position of the magnet matrix are experimentally verified with a XY linear motion stage. The proposed 2D hall sensor array is compatible to a sine encoder and is directly applicable to commercial motion controllers.

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Section: Introductionmentioning

confidence: 99%

2D hall sensor array for measuring the position of a magnet matrix

Ahn

Kim

2014

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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“…The research and project monitoring results of the hybrid project were reported, good complementary characteristics between the solar and wind energy were found, and the hybrid system turned out to be able to perform very well as expected throughout the year with the battery over-discharge situations seldom occurred. W Kim and D. L. [6] Trumper presented a high-precision magnetic levitation (maglev)stage for photolithography in semiconductor manufacturing. This stage is the world's first maglev stage that provides fine six-degree-of-freedom motion controls and realizes large (50 mm 350 mm) planar motions with only a single magnetically levitated moving part.…”

Section: Dc-ac Conversion / Battery Charging Unit:-mentioning

confidence: 99%

Design and Fabrication of Maglev Wind Turbine.

Ghare¹,

Patil²,

Padgal³

et al. 2017

IJAR

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The traditional wind turbine need very high structures to allow room for their massive blades, hence Maglev Turbines are an ideal solution. It is estimated that renewable sources might contribute about 20%-50% to energy consumption in the later part of the 21st century. Maglev wind turbines have several advantages over conventional wind turbines. For instance, they're able to use winds with starting speeds as low as 1.5 meters per second (m/s). Also, they could operate in winds exceeding 40 m/s. At present the largest conventional wind turbines in the world produce only five megawatts of power. However, one large maglev wind turbine could generate one GW of clean power, enough to supply energy to 750,000 homes. The paper aims to make a systematic analysis of design and fabrication processes to find out optimum output from the Vertical Axis Maglev Wind Turbine and by also using solar panel for using the solar energy to generate electricity.Copy Right, IJAR, 2017,. All rights reserved. …………………………………………………………………………………………………….... Introduction:-Combining latest MagLev technology with PV (Solar) panels gives the best of both worlds for greater independence from costly grid electricity bills. From apartments to street lighting, hybrid systems are starting to bring consistent power to areas worldwide, MagLev turbines are an ideal solution to the traditional wind turbine, which need very high structures to allow room for their massive blades. MagLev technology (so called due to the 'magnetic levitation' friction free drive) has been around for a while as we know from the Magnetic Levitation high speed trains.Using MagLev technology in VAWT's (Vertical Axis Wind Turbine) means less moving parts, less maintenance, smaller profile and most importantly, very little wind to start working due to the lack of friction.The smaller more compact design of the VAWT, makes it ideal for home use as the unit and blades stand upright. Having magnetic levitation means the turbines weight is frictionless in operation allowing even a small breeze to turn it and produce power. The Excluss MagLev uses latest NdFeB (Neodymium) rare earth magnets which are 10x stronger than others, eliminating the need for any electromagnetic drive, making them friction and virtually maintenance free. Due to air/ground temperature difference, when the sun goes in ground wind instantly increases. So the Excluss hybrid system produces power day and NIGHT.

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“…Magnetic levitation systems can provide advantages for applications in manipulation (Oh et al, 1993;Khamesee & Shameli, 2005) fine positioning (Kim & Trumper, 1998;Kim et al, 2004), and haptic interaction Berkelman & Hollis, 2000). Surveys of magnetic levitation technology for rail transportation are given in and for magnetic bearings in (Schweitzer et al, 1994).…”

Section: Magnetic Levitation Systemsmentioning

confidence: 99%