High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid, J.G.; Iriarte, G.F.; Williams, Oliver A.; Calle, F.

doi:10.1016/j.sna.2012.09.012

Cited by 100 publications

(48 citation statements)

References 35 publications

(48 reference statements)

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“…Then it was tested up to 300 ∘ C and had a maximum sensitivity of 179.2 kHz/kPa which was many times higher than the LC based sensor proposed in [10] and SAW based sensor in [11]. It was promising to be used for inner engine pressure measurement in the near future for farther research, realizing a real sense of contactless measurement in harsh environment.…”

Section: Journal Of Sensorsmentioning

confidence: 99%

“…We can see that there is a one-to-one relationship between each temperature and the correspondent linear function which can be determined using (10) and (11). For practical application, the pressure can be obtained relying on a method called table lookup on the premise that the temperature is measured in advance via methods proposed in [3][4][5].…”

Section: Measurement Of the Sensormentioning

confidence: 99%

See 1 more Smart Citation

Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

Guo

Tan

et al. 2017

Journal of Sensors

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A novel reentrant cavity-microstrip patch antenna integrated wireless passive pressure sensor was proposed in this paper for high temperature applications. The reentrant cavity was analyzed from aspects of distributed model and equivalent lumped circuit model, on the basis of which an optimal sensor structure integrated with a rectangular microstrip patch antenna was proposed to better transmit/receive wireless signals. In this paper, the proposed sensor was fabricated with high temperature resistant alumina ceramic and silver metalization with weld sealing, and it was measured in a hermetic metal tank with nitrogen pressure loading. It was verified that the sensor was highly sensitive, keeping stable performance up to 300 kPa with an average sensitivity of 981.8 kHz/kPa at temperature 25 ∘ C, while, for high temperature measurement, the sensor can operate properly under pressure of 60-120 kPa in the temperature range of 25-300 ∘ C with maximum pressure sensitivity of 179.2 kHz/kPa. In practical application, the proposed sensor is used in a method called table lookup with a maximum error of 5.78%.

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Section: Journal Of Sensorsmentioning

confidence: 99%

Section: Measurement Of the Sensormentioning

confidence: 99%

Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

Guo

Tan

et al. 2017

Journal of Sensors

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“…As the SAW is only propagated on the surface, all the energy is concentrated almost within a wavelength from the surface to the inside, the SAW is not able to pass through when the surface roughness is more than a wavelength [16,17]. Degrading the RMS surface roughness of the films is beneficial for obtaining a low insertion loss for SAW devices by reducing the transmission loss and scattering loss of the SAW [18].…”

Section: Surface Morphologymentioning

confidence: 99%

Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate

Zhang

Zhu

Zhou

et al. 2014

J Mater Sci: Mater Electron

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In this work, scandium aluminum nitride alloy (ScAlN) thin films were prepared on c-sapphire substrates by DC reactive magnetron sputtering with a scandium aluminum alloy (Sc 0.06 Al 0.94 ) target. The crystal orientation and surface morphology were detected by XRD and AFM, respectively. The electrical properties were analyzed by a standard ferroelectric test system and piezoelectric response force microscopy. The results show that the sputtering atmosphere, including N 2 /Ar flow ratio and sputtering pressure, appears to be important to influence the crystal quality and electrical properties of ScAlN films. With the N 2 /Ar flow ratio increasing from 3.1:7 to 3.6:7, the crystal orientation and surface morphology of ScAlN films firstly improves and then gets worse. Meanwhile, the electrical qualities of the films performs a similar variation. When the sputtering pressure increases from 0.3 to 0.7 Pa, the properties of the films change obviously too, and the best sputtering pressure is determined as 0.5 Pa. Finally, highly c-axis ScAlN films can be obtained with a N 2 /Ar flow ratio of 3.4:7 and a sputtering pressure of 0.5 Pa, and the FWHM value of the rocking curve, the RMS roughness, the resistivity, the dielectric constant e r and piezoelectric constant d 33 are 2.6°, 2.650 nm, 2.9 9 10 12 X/cm, 12.2 and 8.1 pC/N, respectively.

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“…Various SAW sensors had been developed and applied to physical, chemical, industrial and biomedical fields [1,2,3,4,5]. Meanwhile, to fabricate SAW sensors with high sensitivity and low temperature coefficients, multilayered structures were generally selected, in which ZnO films deposited on substrates were preferred layered materials [3,4,6,7].…”

Section: Introductionmentioning

confidence: 99%

Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures

Lan

Zhang

Fan

et al. 2016

Sensors

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The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of (112¯0)ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized.

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High precision pressure sensors based on SAW devices in the GHz range

Cited by 100 publications

References 35 publications

Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate

Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures

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