“…Compared with three-dimensional (3-D) structures, photonic crystals, or metal resonators, dielectric supersurfaces with high Q-factor have advantages in terms of flexibility, size, and nonlinear optical compatibility [ 8 , 9 , 10 ]. The all-dielectric metasurface supports Mie resonance and can provide high Q-factor and FOM (Figure of Merit), and is more compatible with complementary metal oxide semiconductor production processes [ 10 , 11 , 12 ]. Therefore, all-dielectric metasurface-based sensors exhibit stronger light-harvesting capabilities and smaller volumes, enabling label-free, on-chip integration, and ultrasensitive sensing, which become current research hotspots.…”