High-Q silica microdisk optical resonators with large wedge angles on a silicon chip

Optomechanically tuned electromagnetically induced transparency-like effect in coupled optical microcavities

“…23. The main difference in the fabrication process is that we here used an NSR-1755i7B stepper to pattern the photoresist 30 instead of an electron beam lithography to pattern the e-beam resist. 23 Obviously, this method is more efficient and more compatible with the conventional semiconductor processing.…”

Whispering-Gallery Mode Lasing in a Floating GaN Microdisk with a Vertical Slit

“…The smooth surfaces of a WGM laser's microcavity allow for total internal reflection with minimal optical loss, thus producing a high quality factor (Q) and a lower laser threshold than other types of structures. WGM lasing from microcavity has important potential applications in single-particle label-free sensing microdisplays used for imaging and scanning 9,10 and in the integration of electro-optical devices onto a single wafer [11][12][13][14] . Researchers have been trying to develop a variety of microcavity structures with favorable lasing quality, mode, and directional emission, which are fundamentally important properties for the integration of optoelectronic devices.…”

Integrated cavity opto-electromechanics: electrical tuning and control of optomechanical systems

“…Because the perimeter is circular, the grazing angle of light at the outer interface remains small the entire way along the optical path. This allows for the light to experience total internal reflection, and remain contained within the cavity, as shown in On-chip geometries such as microrings [27,124], microdisks [125][126][127][128][129] (a), double-disks [130][131][132][133][134][135][136][137] (b) and microtoroids [1,26,97,[138][139][140][141] (c) are made through lithography techniques, while microspheres [142][143][144] (d) are typically made by melting the end of an optical fibre (though they can also be fabricated on-chip [145]). Microbottle [146,147] or microbubble [148,149] resonators (e) are made through a more complicated melting and pulling process, and are often used in sensing applications.…”

“…Since in general a proportion of the optical mode resides outside of the dielectric material making up the cavity, it is typical that the modal effective refractive index is lower than the refractive index of the material (n eff < n material ) and the radius of the mode is larger than the radius of the device (R > R device ), unless a geometric feature (e.g. wedged sidewalls [127,128]) pushes the mode towards the centre of the device.…”

“…Whispering gallery mode 87 . Creating a wedged device has allowed the Q of single disks to be increased to 10 7 [128,220], but are also impractical here as this causes a mismatch in the radius of the top versus the bottom disk, which affects the hybridisations of the modes [131]. While the optical quality factors achievable with double-disks are less than for other WGM devices, the increase in its optomechanical coupling strength is much larger, as is discussed in Chapter 7.…”