“…Sheet resistance was found to follow the same trend as the resistivity, reducing slightly with the initial temperature rise before increasing significantly at higher temperatures ( Figure 5). Dramatic increases in resistivity and IR transmission have been identified previously in sputtered AZO (eg, [10], [11]). This change is thought to be a result of reduced crystal quality with high temperature.…”
Section: Fig 2 Transmission Curves For Rf Depositions (A) and DC Dementioning
“…Sheet resistance was found to follow the same trend as the resistivity, reducing slightly with the initial temperature rise before increasing significantly at higher temperatures ( Figure 5). Dramatic increases in resistivity and IR transmission have been identified previously in sputtered AZO (eg, [10], [11]). This change is thought to be a result of reduced crystal quality with high temperature.…”
Section: Fig 2 Transmission Curves For Rf Depositions (A) and DC Dementioning
“…This behavior increased the resistivity values of the film. According to Isherwood et al, [ 53 ] it is possible that during deposition of the film, removal of the Zn species, due to the temperature rise caused in the substrate, as well as the migration of Al to the grain boundaries where aluminum oxide is formed instead of continuing to act as a dopant. However, this second hypothesis can be ruled out, as no secondary phases were found in XRD analyses.…”
This work addresses, in an experimental and theoretical way, the influence of different oxygen pressure values on the physical and electronic properties of thin conductive and transparent oxide films of Al‐doped ZnO, with different thicknesses. A series of characterization techniques, which include X‐ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), optical spectrophotometry, and Hall measurements are conducted. All films have a hexagonal wurtzite structure characteristic of ZnO, with preferential orientation along the plane (002) and transmittance values, in the visible range, greater than 80%. The increase in flow oxygen up to 25% provides an increase in the film's density resulting in a decrease in electrical resistivity from 9.58 × 10−3 Ω cm to 8.14 × 10−3 Ω cm. The ab initio calculations allow to observe the distortions in the microstructure of the films attributed to the presence of impurities and to obtain the values of the total and formation energies. The values of the Mulliken population and chemical bond length are notoriously influenced by the concentration of oxygen in the atmosphere. The displacement of the valence band (VB) and the Fermi level, together with the decrease in the gap energy, reinforce the influence of oxygen gas on the electronic structure of the films.
“…Introducing Al content into the film significantly reduced the RMS to ~2 nm with a markedly uniform grain size distribution (Figs 1c and S2b–e). In general, increasing Al concentration reduced the mean grain size and improved the surface flatness, which were desired for achieving high transparency 15 .Figure 1Morphology and crystal structure of AZO-CNF papers. ( a ) Optical image of an as-fabricated CNF paper from the CNF gel (Top) and an AZO-coated CNF paper (Bottom).…”
The rapid development of wearable and disposable electronic devices and the rising awareness of environmental sustainability impose growing new demands on the nature degradability of current electronic and energy systems. Here we report a new type of flexible transparent conductive paper completely made from green and earth abundant materials which are also fully degradable and recyclable. Aluminum-doped zinc oxide (AZO) was deposited by low-temperature atomic layer deposition (ALD) as the transparent conductive oxide (TCO) layer on transparent cellulose nanofibril (CNF) papers. The mesoporous structure of the CNF paper rendered strong adhesion of the AZO layer and exhibited excellent mechanical integrity and electrical conductivity within a wide range of tensile and compressive strains. The AZO-CNF paper could be completely dissolved in warm city water after one-hour stirring, demonstrating an excellent nature degradability. A flexible and transparent triboelectric nanogenerator (TENG) was further fabricated using such AZO-CNF papers with a performance that was comparable to other synthetic polymer-based systems. This work illustrated a new and promising strategy of utilizing 100% green and degradable materials in novel electronic and energy harvesting devices.
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