High quality ZnO films deposited by radio-frequency magnetron sputtering using layer by layer growth method

Євтушенко, А. І.; Karpyna, V. A.; Лазоренко, В. Й.; Lashkarev, G. V.; Khranovskyy, Volodymyr; Батурин, В. А.; Karpenko, A.; Lunika, M.; Avramenko, K. A.; Strelchuk, V. V.; Kutsay, O.

doi:10.1016/j.tsf.2009.12.023

Cited by 55 publications

(18 citation statements)

References 14 publications

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“…Figure 2a shows a scanning electron microscope (SEM) photo of a 4 μm thick ZnO thin film as an example. It can be seen that the ZnO film consists of highly-oriented columnar nanograins perpendicular to the substrate, a growth result similar to what has been previously achieved on Si substrates2829. X-ray diffraction (XRD) characterization reveals that the (0002) ZnO crystal orientation dominates the crystal orientation (Figure 2b).…”

Section: Resultssupporting

confidence: 83%

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

Jin

Zhou

et al. 2013

Sci Rep

124

104

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Flexible electronics are a very promising technology for various applications. Several types of flexible devices have been developed, but there has been limited research on flexible electromechanical systems (MEMS). Surface acoustic wave (SAW) devices are not only an essential electronic device, but also are the building blocks for sensors and MEMS. Here we report a method of making flexible SAW devices using ZnO nanocrystals deposited on a cheap and bendable plastic film. The flexible SAW devices exhibit two wave modes - the Rayleigh and Lamb waves with resonant frequencies of 198.1 MHz and 447.0 MHz respectively, and signal amplitudes of 18 dB. The flexible devices have a high temperature coefficient of frequency, and are thus useful as sensitive temperature sensors. Moreover, strong acoustic streaming with a velocity of 3.4 cm/s and particle concentration using the SAW have been achieved, demonstrating the great potential for applications in electronics and MEMS.

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Section: Resultssupporting

confidence: 83%

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

Jin

Zhou

et al. 2013

Sci Rep

124

104

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“…In the Raman spectra of ZnO nanoneedles ( Figure 5), there is a well-known intense E2 low phonon band at 98.9 cm −1 (FWHM ≈ 5.3 cm −1 ) and a E2 high phonon band at 437 cm −1 (FWHM ≈ 9.5 cm −1 ) associated with the motion of Zn and O sublattices, respectively [12]. These small FWHM magnitudes of E2 Low and E2 High modes confirm the wurtzite ZnO structure for nanoneedles deposited by MEE using concentrated solar radiation [13,14]. The position of the E2 high band at 437 cm −1 corresponds to the phonons of a bulk ZnO crystal [15], indicating a strain-free state of the nanoneedles.…”

Section: Sem Images Ofmentioning

confidence: 52%

Solar Explosive Evaporation Growth of ZnO Nanostructures

et al. 2017

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Abstract:For the first time, we present a novel method of explosive evaporation (MEE) for the deposition of ZnO nanostructures using concentrated solar radiation for precursor evaporation. Zinc acetylacetonate powder and a mixture of ZnO with graphite powders are used as precursors for the deposition of ZnO nanostructures. ZnO nanostructures are deposited on Au/Si, Ag/Si, and unpolished Si substrates by MEE. The scanning electron microscopy, energy dispersive X-ray analysis, X-ray diffraction, Raman scattering, photoluminescence, and Fourier transformed infrared spectroscopy are used for sample characterization. We demonstrate that the changing of precursors and the substrate types allows ZnO nanostructures to be grown with diverse morphologies: hexagons, spheres, and needles. The properties of ZnO nanostructures deposited on unpolished, coated by Ag and Au silicon substrates are discussed. MME using concentrated solar radiation is promising method for applications in the semiconductor industry as an economically efficient environmentally-friendly method for the growth of nanostructures.

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“…The FWHM of the peak in the XRD curve is 0.152° for the 4 μm ZnO film, comparable to those obtained from solid substrates. Figure 2(b) is the SEM image of the cross-section of the ZnO film, clearly showing that ZnO thin film is highly (0002) oriented, columnar structured nanocrystal grains perpendicular to the substrate, not different from those deposited on the Si-substrates [18]. The grain size can be estimated using the Debye-Scherrer formula [17], and the result is shown in Fig.…”

Section: Resultsmentioning

confidence: 96%

Flexible surface acoustic wave devices and its applications in microfluidics

Zhou

Wang

et al. 2014

MRS Proc.

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Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

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High quality ZnO films deposited by radio-frequency magnetron sputtering using layer by layer growth method

Cited by 55 publications

References 14 publications

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

Solar Explosive Evaporation Growth of ZnO Nanostructures

Flexible surface acoustic wave devices and its applications in microfluidics

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