2002
DOI: 10.1364/ao.41.003256
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High-reflectivity HfO_2/SiO_2 ultraviolet mirrors

Abstract: High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of approximately 99% near 250 nm are reported.

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Cited by 88 publications
(31 citation statements)
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“…In addition, at this temperature, a very small amount of SiO 2 , in the form of cristobalite, has been detected (Fig.2). This could be explained by an initial formation of amorphous silica which then transforms to cristobalite above 1200 o C [5]. The HfO 2 coatings were subjected to re-entry tests up to 100 cycles at 1450 o C. These tests showed no flaking-off of the coatings.…”
Section: Resultsmentioning
confidence: 99%
“…In addition, at this temperature, a very small amount of SiO 2 , in the form of cristobalite, has been detected (Fig.2). This could be explained by an initial formation of amorphous silica which then transforms to cristobalite above 1200 o C [5]. The HfO 2 coatings were subjected to re-entry tests up to 100 cycles at 1450 o C. These tests showed no flaking-off of the coatings.…”
Section: Resultsmentioning
confidence: 99%
“…The effective length λ is given by λ Z(3) /n b , where λ Z (3) is the resonant wavelength of the Z 3 exciton in vacuum, and n b is the background refractive index. The values of n b for CuCl, HfO 2 , and SiO 2 are 2.36, 16 2.05, 17 and 1.50, 17 respectively. The thicknesses of the HfO 2 and SiO 2 layers in the DBR were designed as λ/4.…”
Section: Methodsmentioning
confidence: 96%
“…HfO 2 is preferred for optical devices such as optical filters, high-reflectivity mirrors, high power lasers and other optoelectronic devices because of its desirable properties such as high refractive index, high laser damage threshold and high transparency in the visible and ultraviolet (UV) spectral ranges [1][2][3][4][5]. Because of its outstanding chemical stability, electrical and mechanical properties, high-dielectric constant and wide band gap, hafnium dioxide (HfO 2 ) has been considered as one of the most important materials with a wide range of potential scientific and technological applications in electronics [6,7], magneto-electronics [8,9], optoelectronics [10] and metal oxide semiconductor devices [11].…”
Section: Introductionmentioning
confidence: 99%